Used KLA / TENCOR / PROMETRIX 6200 Surfscan #177831 for sale

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KLA / TENCOR / PROMETRIX 6200 Surfscan
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ID: 177831
Wafer Size: 6"
Inspection system, 6", parts system Specifications: Arm type: Single Defect sensitivity: 0.13 micron defect sensitivity @ 80% capture, based on PSL standards Repeatability: 0.5% at 1 standard deviation Accuracy: Accuracy within 1% Measurement range: 0.08um to 9999um Throughput: Up to 150 wafers per hour using 6" wafers Contamination: Less than 0.5 particles/cm squared greater than 0.15um diameter per single pass Laser power: 9.9~8A Missing some PCB parts.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a wafer testing and metrology equipment designed to measure the surface parameters of semiconductor wafers. This system utilizes a state-of-the-art high-resolution reflective imaging and advanced metrology sensors in order to accurately measure the atomic and nanostructure characteristics of the wafer surface. Using this unit, users can easily and quickly measure all types of surface features, such as line edge roughness and atomic steps, as well as analyze them in depth. KLA 6200 Surfscan machine also integrates non-metrology scanning probes that allow for analysis of defects and contamination such as piezo particles or lithographical pinholes. This tool is designed to measure wafers up to 300mm in diameter, and it can also be operated in a UV-configurable environment, making it suitable for advanced applications that require UV illumination. Additionally, TENCOR 6200 Surfscan has a dual-zone vision asset, which consists of an optical microscope and a vision model, allowing for detailed measurements and analysis of small details that would otherwise not be visible through traditional imaging methods. PROMETRIX 6200 Surfscan is also equipped with step and reflectometry software, which allows for highly accurate three-dimensional and topographic imaging of the wafer surface. This allows for a detailed analysis of the surface uniformity and microstructures at the atomic level, as well as nanostructures that can't be measured using other techniques. Additionally, 6200 Surfscan comes with an opto-mechanical equipment that consists of an opticalbench, an objective lens, and a detector, all of which are designed to ensure structural stability and accuracy at all times. To make the most of this system, it can be paired with other devices such as the digital camera or the resist measurement probe. The resist measurement probe allows for the collection of data at the atomic level, which can then be used to generate highly accurate electrical characteristics such as capacitance or resistance. This data can be used to further refine the design of semiconductor chips and devices. Overall, KLA / TENCOR / PROMETRIX 6200 Surfscan is a powerful, state-of-the-art wafer testing and metrology unit that is designed to provide highly accurate and detailed analysis of the surface parameters and electrical characteristics of semiconductor wafers. This machine is suitable for a wide variety of applications, including precision metrology, design optimization, and contamination monitoring.
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