Used KLA / TENCOR / PROMETRIX 6200 Surfscan #198584 for sale

KLA / TENCOR / PROMETRIX 6200 Surfscan equipment is a wafer testing and metrology system used by the semiconductor industry to inspect, analyze, measure, and compare the topographical features on a variety of substrates. This unit allows users to monitor the surface flatness of wafers, and it can be used to perform defect inspections, dielectric uniformity tests, etch depth measurements, and critical dimension measurements. KLA 6200 Surfscan is a versatile and reliable metrology platform that is built on KLA patented Multi-Station Programmed Gradiometry (MSPG) architecture. This architecture enables the machine to accurately measure and track surface topography data over the course of multiple test cycles using ten or more separate surface-measurement tools. The MSPG architecture also facilitates a highly automated, robust tool design that offers reliable performance over long run times. TENCOR 6200 Surfscan features a four-inch visual sample motor, which rotates wafers at multiple speeds to ensure that surface-measurement data is acquired from all wafer surfaces. It also includes high-accuracy laser Doppler interferometers that measure flatness with a resolution of better than 0.2 nanometers on a three-foot-diameter sample area. The asset's automated wafer handling enables fast sample-substrate changes with a minimum of downtime, reducing test time and labor costs. Additionally, a specialized wafer chuck is used to ensure that the sample is held securely during testing. 6200 Surfscan is capable of both 2D and 3D surface topography measurements, allowing users to detect fluctuations in dielectric, polarization, capacitance, and resistivity over the course of time and from one test to another. This model also integrates advanced optical metrology technologies, such as fractography and interference techniques, to measure 3D nanoscale dimensional accuracy. Finally, all of the data acquired by PROMETRIX 6200 Surfscan can be analyzed on a computer by using TENCOR proprietary InSpec software. This software allows engineers to store the acquired data in a secure central database, compare data from multiple runs, and visualize and analyze the results in three-dimensional graphs. KLA / TENCOR / PROMETRIX 6200 Surfscan is a reliable and easy-to-use wafer testing and metrology equipment that provides accurate and repeatable measurements across a variety of substrates. Its advanced MSPG architecture and automated sample handling minimizes downtime and labor, and its high accuracy laser Doppler interferometers offer excellent repeatability and accuracy. Additionally, the system is capable of measuring 2D and 3D surface topographies and its InSpec software allows for easy storage, comparison, and visualization of the acquired data. KLA 6200 Surfscan is an ideal tool for any semiconductor or research professional looking for a reliable and cost-effective metrology unit.