Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9352549 for sale
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ID: 9352549
Wafer Size: up to 8"
Particle counter, up to 8"
Motor distribution
4 Channels motor control
4 Channels power motor drive
General purpose I/O
Power distribution
VGA
CPU: 486
PMT Pre-amplifier
Wafer detector
Keyboard interface
Timing generator
Particle area processor
Haze
Analog
Right indexer
Left indexer
Lead screw
HD driver
PMT Tube
PMT Power supply
Scan mirror
Laser
Laser power supply
Floppy disk
Mouse
Sort-cam
Puck
AC Module
DC Module.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a sophisticated wafer testing and metrology equipment developed by leading semiconductor equipment supplier KLA. Designed for the critical process control requirements of the cutting-edge semiconductor industry, KLA 6200 Surfscan offers the most accurate, precise and comprehensive metrology capabilities available, enabling world-class manufacturers to achieve the highest yield and highest performance from their production processes. TENCOR 6200 Surfscan's advanced imaging capabilities allow for the capture and analysis of various surface, terrain and profile parameters of a wafer before, during and after processing. Utilizing a two-camera, multi-frame imaging system, imaging parameters including profile and land/valley height, smoothness, coplanarity and flatness are precisely measured with low levels of noise, making 6200 Surfscan ideal for the most demanding application on the market. Beyond its imaging capabilities, PROMETRIX 6200 Surfscan offers superior accuracy and repeatability of measured data, with fast-access data overlays for fast and easy comparison of different wafers. The unit also features proven process control enhancement tools like co-alignment, overlay, surface and 3-D metrology analysis software, that ensures consistently higher yield in production. KLA / TENCOR / PROMETRIX 6200 Surfscan also features a familiar, intuitive user interface that can be shared with other TENCOR metrology systems, allowing users to easily switch between systems to forecast and analyze product yield. Additionally, users can utilize on-board scripting and temporal modeling to save time and optimize performance with powerful data trend and trend analysis tools. Finally, KLA 6200 Surfscan ensures consistent performance with its machine control software, designed to provide the highest levels of device uniformity throughout a production cycle. For extra efficiency and reliability, TENCOR 6200 Surfscan supports automatic sensor and thermal engine calibration, making sure the tool is always working at peak performance. 6200 Surfscan is the leading wafer testing and metrology solution on the market, utilizing state-of-the-art imaging and process control technologies to deliver the highest performance and highest yields for the semiconductor industry.
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