Used KLA / TENCOR 6220 Surfscan #193077 for sale

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KLA / TENCOR 6220 Surfscan
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ID: 193077
SURFSCAN inspection system Currently stored in air-conditioned area.
KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed for advanced semiconductor research and integrated circuit manufacturing. This system is part of the 62XX family of wafer testing systems which offer high speed, wide area, and in-depth analysis capability. KLA 6220 Surfscan unit features high sensitivity laser scatterometric measurement, up to 1500 wafer images/sec, and 10nm resolution. This machine is configured to utilize standard Photo-Reflectance (PR) and 3D Metrology (3D) lasers to perform accurate testing of wafer features. Specifically, TENCOR 6220 Surfscan tool is capable of analyzing wafer topography and surface roughness by measuring the reflection of a controlled light source at different angles. This allows for the measurement of a variety of features such as single- or multi-layered dielectric structures, as well as trenches, contacts, vias, and other structures. The asset employs an advanced laser interferometer and a unique 3D dual-sensor design which enables high-speed nanometer level measurements for accurate alignment and parameter evaluation. Additionally, the model provides advanced web-based software for wafer profiling, defect analysis, process monitoring, and contour mapping. This powerful software allows users to analyze and visualize the wafer topography, detecting defects or performing precision metrology with ease. The software also assists with the report generation process by providing automated data collection and analysis functions. Furthermore, 6220 Surfscan equipment allows for clustering of similar features for improved detection of process aberrations. KLA / TENCOR 6220 Surfscan is an advanced wafer testing and metrology system designed with users in mind. It offers high accuracy and high speed laser analysis of wafer features and allows for accurate defect identification and process monitoring. The unit's web-based software assists with the report generation process, providing automated data collection and analysis functions. KLA 6220 Surfscan is a prime example of KLA commitment to offering cutting edge technology and advanced monitoring solutions to meet the demanding needs of the semiconductor industry.
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