Used KLA / TENCOR / PROMETRIX 6420 Surfscan #192177 for sale

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ID: 192177
Wafer Size: 8"
Vintage: 1997
Defect inspection systems, 8" Model no. 289108 Specifications: Software version V4.2 Windows 98 (1) port for 200mm wafers, non-copper EI & Gem/SECS with NFS Hummingbird CD-ROM and floppy drive Keyboard 1997 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a state-of-the-art wafer testing and metrology equipment used in the field of semiconductor fabrication. It combines highly advanced imaging and measurement hardware with sophisticated software to provide unprecedented insight into the properties of silicon wafers and other high-tech components. KLA 6420 Surfscan was designed for a comprehensive analysis of devices on an IC wafer, both in terms of metrology and imaging. It utilizes an advanced optics system with an auto-alignment and alignment correction feature to provide rapid, repeatable accuracy in analysis. It also includes several options for process monitoring during die-making, enabling complex process control and analysis, as well as a full range of custom and standard measurement procedures. TENCOR 6420 Surfscan includes an integrated image acquisition unit, allowing for the acquisition of detailed images of up to 8,000x8,000 pixels in size. With a resolution of 0.45 μm, the high resolution allows for detailed analysis of various elements on a wafer, including features such as lines, pitches, and contacts. Additionally, the machine can handle four times higher throughput compared to traditional systems. The 6420 Surf Scan is equipped with two channel parallel detectors, with two measuring heads that can be used in conjunction or separately for inspection. This enables fast and efficient performance, switching between the two channels as necessary. The tool is also capable of advanced 2-D and 3-D image processing, as well as automated defect classification. Advanced algorithms enable PROMETRIX 6420 Surfscan to distinguish between real and false defects, and detect defects whether they are grouped or isolated. Equipped with a fully integrated KLA multiple-zone analysis asset (MZAS) and TENCOR defect classification model (DCS), 6420 Surfscan enables users to fine-tune inspection parameters, as well as to analyze defect density, size and shape. The MZAS allows for rapid measurements of multiple zones across the entire wafer surface, while the DCS can accurately identify grouped, isolated and geometry-dependent defects with various technologies. Overall, KLA / TENCOR / PROMETRIX 6420 Surfscan is a reliable and precise wafer testing and metrology equipment. It provides accurate measurements and detailed analysis of various elements on an IC wafer at an extremely high resolution. It incorporates several technologies, enabling fast and efficient performance while providing great insight into the characteristics and performance of a wafer.
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