Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9205197 for sale

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KLA / TENCOR / PROMETRIX 6420 Surfscan
Sold
ID: 9205197
Vintage: 1995
Measurement system 1995 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a wafer testing and metrology equipment that uses "Blue Scan" imaging and mapping technology to acquire data about both wafer features and wafer defects. This system allows for successful measurements of wafers for two major purposes: first, it is used to measure the topography of wafers in order to determine if the wafer is within specification; and second, it is used to detect potential defects in the wafer surface or in product devices that are on the wafer. KLA 6420 Surfscan provides superior topography imaging and measurement capabilities. It uses both forward scatter and backscatter imaging techniques to produce 2D Blue Scan images of wafer surfaces. The images also contain information about the topography of the wafer's features, such as height, width, pitch, and radius, down to 0.05 µm. These images are evaluated and compared to set standards to ensure that the wafer is within its desired specifications. TENCOR 6420 Surfscan also includes an advanced optical-based detection technology called Automated SmartAnalyzer, which can detect defects based on the optical properties of defects as they are shown in the 2D Blue Scan images. This technology uses a sophisticated combination of algorithms to identify and classify different types of defects, such as particle contamination, overetch, and scratches. Automated SmartAnalyzer is also capable of providing more detailed information about defect types, such as size, shape, and depth. This unit also includes a defect analysis software suite called ProSystem, which can be used to analyze defect data collected by PROMETRIX 6420 Surfscan. ProSystem enables users to generate detailed reports about defect magnitude, distribution, location, and type. This software suite includes built-in statistical processes which can help to identify trends in data sets over time. Overall, 6420 Surfscan is a powerful and versatile wafer testing and metrology machine that offers unparalleled imaging and measurement capabilities. Its combination of Blue Scan imaging, Automated SmartAnalyzer technology, and ProSystem analysis software make it an effective tool for wafer surface imaging, defect detection, and defect analysis.
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