Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9254828 for sale

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KLA / TENCOR / PROMETRIX 6420 Surfscan
Sold
ID: 9254828
Wafer Size: 8"
Vintage: 1996
System, 8" 1996 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan equipment is an advanced wafer testing and metrology system designed to provide comprehensive wafer surface characterization. Specifically, the 6420 offers a wide range of power signature analysis (PSA), films and topography measurements including height calibrations, capacitance, conductivity, critical dimension (CD), roughness, homogeneity, scattering, and line width variations, across a full range of sample sizes and complexity. The 6420 is an integrated unit designed to allow for the fastest, most accurate wafer surface testing. It combines Metrology Stabilization (MSC) technology with the industry-leading ProScan, allowing for atomic level profile measurements accurately and quickly. Using patented algorithms, the 6420 provides precise surface characterization capabilities, with 0.2nm spatial resolutions and 1-2nm vertical resolutions. The machine is also capable of automatically detecting key features such as pads, trenches, vias, and gate, as well as providing edge detection capabilities. The 6420 is an integrated tool that features a range of sensors with different capability sets and measurement methods. These include solutions for tilted, non-uniform and curved patterns, multi-level measurements, or both single and multi-wavelength PSA measurements. It also offers various calibration modes such as self-calibration, water dipping, calibration lines, and manual pad scans. The 6420 provides industry leading repeatability of measurements with less than 3nm fractional view uncertainty. KLA 6420 Surfscan is an intuitive and easy to use asset, featuring user-friendly interface and graphical analysis tools. It is also highly configurable with customizable settings, enabling users to tailor the model to their exact needs. The 6420 features an impressive range of advanced features and offers great versatility for wafer testing. It is an ideal equipment for any production line or laboratory where detailed wafer surface characterization is needed.
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