Used KLA / TENCOR / PROMETRIX 7600 Surfscan #9137281 for sale

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KLA / TENCOR / PROMETRIX 7600 Surfscan
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ID: 9137281
Wafer Size: 6"
Patterned wafer surface inspection system, 6".
KLA / TENCOR / PROMETRIX 7600 Surfscan is a high-performance wafer testing and metrology equipment used to measure the electrical, optical and mechanical characteristics of integrated circuits (ICs). The system provides a comprehensive and repeatable inspection and measurement capability for a variety of wafer substrates and offers a number of measurement options for different types of ICs including resistivity, capacitance, defectivity, uniformity, line width, 3D height, and more. KLA 7600 Surfscan integrates high-resolution lateral scanning microscopes (LSMs) with state-of-the-art CCD cameras and computer-controlled stage systems to provide rapid inspection and measurement of wafers at the nanometer level. This unit has an accuracy of 1 nanometer on the lateral axis and 1 nanometer for the vertical axis, which provides high repeatability and accuracy for the measurement results. In addition, TENCOR 7600 Surfscan provides advanced imaging capabilities such as three-dimensional imaging, complex overlay designs, and high-resolution signal processing. To ensure reliable performance, 7600 Surfscan is designed with a number of high-tech components such as an air-actuated wafer positioning machine and a multi-level dynamic stage tool. The air-actuated wafer positioning asset allows for precise manual and automated placement of wafers to within 1 micrometer, allowing for higher accuracy and throughput. The multi-level dynamic stage model enables three-dimensional scanning with pinpoint focus on areas of interest and offers high depth of focus and high scan speeds to maximize efficiency. PROMETRIX 7600 Surfscan is also equipped with an automated defect review equipment, allowing engineers to quickly review and identify potential defects in scanned wafers. This system is capable of capturing a full set of images in less than half a second and provides a graphical representation of defects based on size and brightness, allowing engineers to quickly investigate and diagnose potential problem areas. In addition, KLA / TENCOR / PROMETRIX 7600 Surfscan offers several control options, including a user-friendly interface which allows engineers to customize the unit to meet specific program requirements and integrate it with other hardware and software systems. Furthermore, the machine is compatible with the industry's leading metrology platforms, ensuring that the results are compatible with industry standards. Overall, KLA 7600 Surfscan tool is a powerful and versatile wafer testing and metrology tool which enables engineers to quickly and accurately detect and diagnose IC defects, ensuring the highest possible standards of quality. This asset offers advanced imaging capabilities, allowing engineers to pinpoint potential problems in an efficient and cost-effective way.
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