Used KLA / TENCOR Surfscan AIT #9155784 for sale

KLA / TENCOR Surfscan AIT is a leading wafer testing and metrology equipment designed for high-speed and high-throughput wafer inspection and metrology operations. It is suitable for a variety of applications, ranging from simple defect inspections to complex process control systems. The system comprises several components, including an advanced hardware unit, integrated software machine, and optional accessories. The hardware component includes an illuminator, objective lens, and detector assembly, which are used to capture images of the wafer for defect detection, metrology, and other inspections. The detector assembly consists of a high-speed CCD or a high-sensitivity CCD depending on the application. The software tool comprises a powerful and intuitive graphical user interface (GUI) and a wide range of automated defect inspection algorithms for inspecting a variety of wafer defects. The GUI is designed to facilitate user-friendly operation for optimal defect detection. The software asset also provides support for advanced eddy current imaging as well as powerful Statistical Process Control (SPC) and Measurement Process Characterization (MPC) functions for improved metrology performance. KLA Surfscan AIT model has several operational features that give it distinct advantages over other wafer inspection and metrology systems. It provides an exceedingly high throughput, up to 300mm wafers per hour, and can be quickly reconfigured to adapt to changing process requirements. It also enables highly precise measurements, with special focus on Patterned Wafers, 3D structures, and integrated circuits. The equipment couples the highly advanced and accurate hardware and software package with industrial-grade ease of use for fast, accurate, and cost-effective wafer testing. It offers simultaneous in-line metrology and defect inspection across multiple application nodes to achieve comprehensive inspection coverage and real-time process optimization. Additionally, compatibility with popular automation control software, Semi-AUTOgonous FABrication (SAF) systems, makes using TENCOR Surfscan AIT system even more attractive. Surfscan AIT unit is a comprehensive, cost-effective, wafer testing and metrology solution that provides the speed and accuracy needed to overcome the complexity of modern wafer production. Its advanced hardware and software capabilities ensure accurate and reliable results, making it an ideal choice for critical process control and monitoring tasks.