Used KLA / TENCOR AIT UV #9147837 for sale

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KLA / TENCOR AIT UV
Sold
ID: 9147837
Wafer Size: 6"
Darkfield inspection system, 6".
KLA / TENCOR AIT UV is an Advanced Inspection Technology (AIT) equipment for automated wafer testing and metrology. AIT systems are designed to address the challenge of identifying and measuring the minutest defects on semiconductor wafer surfaces for the purpose of quality control. KLA AIT UV is a unique system that leverages ultraviolet light and advanced image-processing algorithms to inspect the surfaces of semiconductor wafers with the highest level of accuracy. The unit utilizes two high-resolution cameras to capture images of each side of a wafer in which the incident and the reflected light are arranged in concentric circles and the speed of the inspection process can be selected depending on the application and need. The cameras are configured to produce intricate 2D images and transfer these images to the on-board image processor which applies proprietary algorithms to detect, classify, and measure potential defects on the wafer. The captured images can be stored and analyzed further using specialized software. The machine also features an advanced optical pathway which allows it to detect defects down to a single nanometer accuracy. An advanced optical lens is used to project a highly detailed UV image of the wafer at close range and provides a short working distance for maximum accuracy. It is capable of inspecting wafers coated with thin films, particles, other contaminants or display defects in layers and offers a full range of defect classification capabilities. TENCOR AIT-UV also has a wide range of automation features to ease inspection processes. Real-time defect characterization, pattern recognition, and wafer sorting control are some of the features that help a wide range of applications for wafer production and process monitoring. Moreover, the robust automation capabilities provide repeatable testing and measurement processes, enabling the operator to increase throughput and reduce labour costs. Finally, its intuitive user interface ensures that wafer inspection processes are easily configured and operated, while the software integration facilitates the compatibility of the tool with other industrial equipment. The asset is designed to meet the highest standard of performance required in the semiconductor industry and its combination of high-resolution imaging, microscopic resolution and automation make it an ideal solution for wafer testing and metrology.
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