Used KLA / TENCOR AIT XP+ Fusion #9145961 for sale
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ID: 9145961
Wafer Size: 8"
Vintage: 2003
Patterned wafer dark-field defect inspection system, 8"
System upgraded from AIT2
Wafer shape SNNF (Semi notch no flat)
(2) Cassette ports
Wafer cassette 8 PP: MIRAIAL KM-803P-K
SMIF Interface: No
Laser: Argon ion laser for 75mW 487.9nm
Spot sizes: 7um, 5um, 3.5um
Microscope review objectives: 50x, 100x, 150x
Computer: Yes
Image computer: Yes
Keyboard & floppy disk drive: Yes
Power distribution: Yes
Wafer handler: 8"
Dual open cassette loader: Yes
Robot: Yes
Prealigner: Yes
Blower unit: Yes
Currently crated and warehoused
2003 vintage.
KLA / TENCOR AIT XP+ Fusion is a high-end wafer testing and metrology equipment designed for semiconductor wafer manufacturing. The system consists of an automated wafer inspection and metrology station (AIT XP), an automated wafer saw (Saw 2000), a thin film metrology module (FTM), and a variable-field optical profiler (VPP). The AIT XP+ is capable of testing and analyzing up to 400mm wafers, with measurements traditionally performed on 8-inch wafers being up to 20 times faster. The AIT XP+ is an all-in-one wafer metrology and testing unit, combining imaging capability, advanced light source exposure technology, and non-contact, high-precision metrology. Firstly, its advanced imaging capability allows Wafer Inspection with patented algorithms to achieve high throughput and precision. Secondly, the AIT XP+'s innovative light source technology ensures that features are accurately detected and measured, even at the extreme edge of a wafer. Thirdly, the FTM Light Source, with its unique profile statistics, provides a dependable quality control metrology solution offering precision and repeatability. Fourthly, VPP provides high-precision, controllable non-contact measurement of topographical and chemical features, such as bumps, scribes, tapers, and surface chemistry. KLA AIT XP+ Fusion is a powerful machine that combines these technologies to enable rapid and accurate wafer inspection and metrology. Its sophisticated equipment offers advanced imaging, lighting, and metrology technologies, allowing for faster sample measurements and improved detection accuracy. Furthermore, the integrated reporting workflow allows users to rapidly analyze their results across any parameter. This tool offers multiple customer advantages, including improved process yield, reduced throughput time, and increased product reliability. Additionally, the AIT XP+ utilizing KLA advanced analytics technology provides unparalleled data analysis and process insight. As a result, TENCOR AIT XP FUSION is the perfect tool to ensure accuracy, reliability, and performance.
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