Used KLA / TENCOR ASET F5x #9263174 for sale

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KLA / TENCOR ASET F5x
Sold
ID: 9263174
Wafer Size: 12"
Vintage: 2001
Film thickness measurement system, 12" 2001 vintage.
KLA / TENCOR ASET F5x is an advanced wafer testing and metrology equipment that uses next-generation optical and acoustic technologies for comprehensive, fast, reliable, and cost-effective test and inspection of semiconductor wafers. This system offers a broad range of automated defect inspection and metrology capabilities, in addition to support for several wafer geometries and process settings for quick detection and measurement of defects on the wafer. KLA ASET-F5X utilizes advanced optical and acoustic technologies such as laser scattering, scatterometry, and optical contrast imaging (OCI) to deliver high-resolution and repeatable results for critical applications such as line edge roughness (LER), line width and overlay measurements. The unit is equipped with multiple cameras to acquire high-resolution images of the wafer and its processed layer in both optical backside and frontside imaging modes, and microscope inspection for high resolution images of single features and defects. The machine is also able to detect a wide variety of defects and process-related characteristics with exceptional speed and precision. This is achieved through sophisticated algorithms that can identify particles, slips, breaks, pits, hillocks, wedges, and more. The tool also incorporates a deep learning-based automated defect classifier that is capable of accurately identifying anomalous pattern and structural defects, enabling reliable feedback on process control. In addition, TENCOR ASET F 5 X supports a host of metrology applications, such as traceable dimensional measurements, stochastic scattering imaging, mapping of full-chip areal scan, and metrology of critical process parameters. The asset comes with integrated wafer buffering and robotic wafer handling, allowing it to run multiple runs of high-speed inspection and metrology in parallel. This ensures timely and accurate data acquisition and evaluation. KLA / TENCOR ASET-F5X is a powerful and versatile tool for wafer testing and metrology. It offers high accuracy, speed, and repeatability across a wide range of applications, while also providing reliable access to process control feedback for optimized yield. The model is also backed by comprehensive technical support and application engineering to assist users with their specific needs.
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