Used KLA / TENCOR ASET F5x #9269734 for sale

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KLA / TENCOR ASET F5x
Sold
ID: 9269734
Wafer Size: 12"
Vintage: 2001
Film thickness measurement system, 12" (2) Load ports Handler, 8"-12" Operating system: Windows XP Service Pack 3 2001 vintage.
KLA / TENCOR ASET F5x is a state-of-the-art wafer testing and metrology equipment that is used to provide accurate and reliable measurements for the semiconductor industry. This system offers scalable solutions for a wide range of applications, such as advanced logic and memory technologies. The F5x is a fully automated vision-guided, robotic unit that enables high throughput and accuracy of data. The F5x features a 5X optical magnification machine with large field-of-view (FOV) measurement capability and small feature resolution up to 5 um, enabling the tool to capture a wide range of data and cross-section scans. The asset is also capable of measuring a wide range of electrical parameters such as wafer resistance, capacitance, and leakage values. The F5x includes a range of highly efficient, reliable and modular components, such as a multi-lib robot for rapid loading and unloading, a high-speed auto-focus lens for accurate alignment of test points, and a field-programmable array (FPGA) for complex image processing. Additionally, the model offers various optional components and detectors to suit different application requirements. KLA has designed the F5x equipment with a comprehensive software suite to enable scalability, extendibility, and ease of use. The software suite offers advanced programing tools and modules to enable high-speed analysis and control of measurement results. On the software side, the system is capable of offering a flexible, repeatable and reliable method of testing with data collection and storage. TENCOR F5x unit is designed to meet the high-volume production requirements of the semiconductor industry. Utilizing the F5x machine will provide quick turnaround times, lower cost of ownership, and improved yield and process control. This tool will enable manufacturers to optimize device performance and improve overall process efficiency.
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