Used KLA / TENCOR ASET F5x #9361861 for sale
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ID: 9361861
Wafer Size: 12"
Vintage: 2001
Film thickness measurement system, 12"
Insert type: Conversion, 8"
Data transfer: Floppy Disk Drive (FDD) / DVD R/W
Operation: Mouse and keyboard
Emergency button cover: Recessed type
Door interlock
Recipe auto backup
Auto data deletion
Auto error log file save and classification
Queued loading (Queue recipe)
Operating system: Windows XP
Spectroscopic ellipsometer
Spectrometer
Wavelength of light source: 220~800 nm
Spot size for thickness and RI: < 40μm
Spot size for reflectivity: < 40μm
Mapping function: 2D and 3D
Pattern recognition
Recipe copy with film library
SE and DBS Optics
Optic lens: 1x, 2x, 4x, 15x
Pattern score: FA
Location screen: Visualize on one screen
Pattern recognition image / Measurement site save
Spectrum save function (Save all at once)
Spectrum save and auto deletion
Recipe / Library import: On-time intromit at TCP/IP
AMHS
Signal tower
Wafer breakage
Options:
GEM SEMI E30-98
SECSⅡ SEMI E5-93
Recipe generator
Remote access capability
Light tower
Carrier ID, 12"
Safety shield, 12"
Light tower
HSMS Communication
Recipe generator
S3 Handler
Controller:
CPU: Pentium 4 3.0 GHz
Memory: 1.024 G Byte DRAM
(2) Hard Disk Drives (HDD): 80 GB missing
2001 vintage.
KLA / TENCOR ASET F5x is a wafer testing and metrology equipment designed to deliver high throughput, high reliability data for the semiconductor fabrication industry. This system allows users to quickly evaluate wafer characteristics including dielectric properties, material composition, and material uniformity with minimal manual intervention. KLA ASET-F5X model is designed to rapidly and accurately detect and measure dielectric leakage current, resistance, and capacitance of samples on various test structures as part of in-line metrology or electrical testing. This unit offers fast, reliable measurements with overspill rejection rates of over 99.99%. A powerful on-board processor manages the measurement data and users can store multiple test fixtures and procedures as part of a pre-set library. The device is constructed with a compact benchtop design, making it ideal for integration into existing semiconductor manufacturing assembly lines. The machine features a high-resolution, radial laser alignment tool, a programmable vibration isolation platform, and a four-wheeled motorized spindle table for efficient wafer positioning. This allows precise and repeatable sample positioning and alignment, reducing the time required to move the samples around the asset. In addition to its high-performance capabilities, TENCOR ASET F 5 X is also packed with safety features. The model offers full overvoltage protection, local interlocks, and short circuit protection in order to ensure the safety of operators and the equipment hardware. It also comes with a mobile emergency stop unit and an integrated power supply for a single point connection. KLA / TENCOR ASET-F5X is an ideal choice for users who need high-speed, reliable, and accurate wafer testing and metrology. It offers superior throughput and repeatability along with industry-leading safety features, making it an ideal choice for semiconductor manufacturing facilities looking to streamline their operations.
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