Used KLA / TENCOR ASET-F5x #9363501 for sale
ID#: 9363501
Film thickness measurement system, 8"-12"
Open cassette loader, 8"-12"
PDBS (Ehanced)
Dual beam spectrometer (XENON Lamp)
Spectroscopic Ellipsometer (SE)
DUV SE (Deep UV SE, 190 nm)
Pat maximum: 8100
CPU
Frequency: 2.6 GHz
Operating system: Windows NT.
Manufacturer:
KLA / TENCORModel:
ASET-F5xCategory:
WAFER TESTING AND METROLOGYWafer Size:
8"-12"Equipment Details:
Open cassette loader, 8"-12"
PDBS (Ehanced)
Dual beam spectrometer (XENON Lamp)
Spectroscopic Ellipsometer (SE)
DUV SE (Deep UV SE, 190 nm)
Pat maximum: 8100
CPU
Frequency: 2.6 GHz
Operating system: Windows NT.
