Used KLA / TENCOR M-Gauge 200 #200432 for sale

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KLA / TENCOR M-Gauge 200
Sold
ID: 200432
Vintage: 1993
Metal thickness measurement system 1993 vintage.
KLA / TENCOR M-Gauge 200 is a high-end wafer testing and metrology equipment designed for accurate, repeatable measurements of wafers. KLA M-Gauge 200 combines the best of KLA systems with the latest in metrology technology to ensure the highest level of accuracy and reproducibility. The system includes a 200mm, 30-megapixel, video inspection head and a multi-sensor metrology unit capable of measuring up to 200 nanometer features. The machine is capable of measuring wafers at speeds up to 80 wafers per hour, and is equipped with redundancy features that ensure accurate measurements and prevent data loss. The tool uses a dual-beam laser interferometer to achieve fast, accurate, and distortion-free 3D measurements, and features a computerized tuning asset to allow for dynamic adjustment of the interferometer. This enables the user to rapidly adjust the optical path for optimal accuracy. The model also features a precision alignment equipment to ensure that the wafer is always correctly centered on the inspection field and measurements are never distorted by any misalignment of the wafer or system components. TENCOR M-Gauge 200 features a high dynamic range detector to achieve accurate measurements from large features to small, and is capable of measuring features up to 200 nanometers in size. The unit also includes acousto-optic beam steering that can scan across the entire field of view with ultra-high precision, even at the highest scanning speeds. This ensures that the machine is able to accurately measure the most complex shapes and features, including high-density wafers. M-Gauge 200 is built for accuracy and reliability, and is equipped with multiple internal redundancy features to avoid data loss. The tool also features a process control capability that allows users to verify the accuracy of their measurements and to automate the process of monitoring the performance of the asset. KLA / TENCOR M-Gauge 200 is the perfect choice for demanding wafer testing and metrology applications. Its advanced features and high-precision measurements ensure accuracy and repeatability, while its process control capability allows users to optimize and automate their testing and metrology procedures.
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