Used KLA / TENCOR M-Gauge 300 #128691 for sale

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ID: 128691
Thickness measurement system, 6"-8" Non-Contact Wafer monitor for Sheet Resistance Digital data converter, model 20 03030 Does not include printer Power requirements: 100V, 1A, 1ø, 50Hz Measurement Range: 1m ohm/square to 1,999 m ohm/square Ω/mΩ Switch ( on rear of measurement head ) Power Switch ( rear panel ) Measurement head Wafer carriage Display Disk access door Main / Auto button Start / Standby button 1996 vintage.
KLA / TENCOR M-Gauge 300 equipment is an advanced wafer testing and metrology system used for high tech manufacturing. This unit is often used to measure and inspect the thickness, flatness, roughness, uniformity and other characteristics of wafers used for the production of semiconductor devices and other optoelectronic products. KLA M-Gauge 300 employs a three-dimensional profile for precise metrology of both the 2D and 3D surface features of wafers. TENCOR M-Gauge 300 utilizes a 5-axis scanning platform composed of two independent axes of scanning: the X and Y axes, which control the scanner's relocations across the surface of the sample, and the Z-axis, which controls the scanner's height. This scanning platform allows for precise individual measurements of each feature on the wafer surface, as well as fully integrated topography and roughness measurements. Additionally, M-Gauge 300 offers an automated calibration machine for each scanning axis, allowing users to quickly and accurately set the wafer surface to match a known reference surface, and achieve the highest possible level of accuracy within the metrology data set. KLA / TENCOR M-Gauge 300 provides a comprehensive tool set for Wafer Test and Metrology. This includes features such as focused ion beam milling, laser material removal, interferometry and video imaging. These tools enable users to identify defects on the wafer surface quickly and accurately to a resolution of 3 nanometers. KLA M-Gauge 300 also offers a statistics module, which collates data into a single report for easy analysis. This module also provides pass/fail inspections and can be used to generate statistical certifications of the wafer's features. TENCOR M-Gauge 300 is a versatile and reliable tool for wafer metrology, providing precise, accurate results for a wide variety of wafer test applications. It offers flexible and customizable options designed to meet the needs of any production environment, and its intuitive interface and automated calibration options make its operation and use easy and straightforward. By relying on this state-of-the-art wafer testing and metrology tool, users can rest assured that their production results will meet the highest quality standards.
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