Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9199098 for sale
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ID: 9199098
Wafer Size: 8"
Vintage: 1995
Wafer inspection system, 8"
Cleaning & Wipe-down
With IPA
Puck height
Laser & Optical alignment
18 Mil thick wafers
System belts
Vacuum lines
Ribbon cables
DC Power supply
Laser power supply: GP / IO Program
Wafer indexers: 6" to 8"
Adjust both the left and right
Through beam voltage: 3.0 V DC
Measurement electronics:
INSW
Particle
Haze PCB's
Clean & Lube the wafer robot
Sort-cam
Left & Right lead screws
Scan mirror alignment:
OEM Specification: 20um/sec
EDS and XlY
Up to 200mm capable
Manual cassette load onto elevator
Defect sensitivity: 0.09um at 80% Capture rate
Ar ion laser wavelength: 488nm
Blower unit
R&D Activity
Operating system: Windows 3.11 / KLA 4.0
1995 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a high-precision wafer testing and metrology equipment. It is designed to address the development challenges of large-scale wafer processing technology and to provide reliable measurements of critical device characteristics. Before the advent of KLA 6200 Surfscan, a great deal of labor and time was required to inspect each individual wafer, find defects, and understand their root causes. TENCOR 6200 Surfscan allows for reliable characterization and testing of wafers, enabling manufacturers to better understand the performance of their products, easily identify defective wafers and devices, and improve their process control. The system offers fast, accurate, and repeatable measurements across a diverse range of materials and wafer flatness or non-planarity applications. This speed and accuracy help manufacturers minimize the turnaround time for evaluating their process parameters. Furthermore, 6200 Surfscan uses advanced optical imaging and wafer tracking systems to achieve highly precise measurements and deliver data with greater integrity. The unit also provides operators with automated routines, such as particle counting, data capture, metrology, and other measurements, that can be used to identify potential issues with the wafer structure, the electrical properties of the devices, or contaminants on the wafer surface. It also includes advanced defect detection capabilities such as Darkfield Mode to find foreign particles on the wafer surface. The machine also offers unsurpassed surface topography analysis capabilities using parameters like a line scan, FFT, 3D profile, and amplitude both in Z and X, Y axes modes. In addition, PROMETRIX 6200 Surfscan offers high sensitivity for non-planar (3-D) topography and texture measurements. This is possible using advanced algorithms that detect fine differences at a micro level. The tool is also capable of rapidly scanning a wide range of materials, from bulky specimens to epi substrates. KLA / TENCOR / PROMETRIX 6200 Surfscan is revolutionizing wafer testing and metrology by providing a comprehensive, fast, and repeatable way to measure, characterize, and classify wafers. With its advanced features and capabilities, it is helping wafer processing industries improve process control and become more efficient as well as cost-effective.
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