Used KLA / TENCOR / PROMETRIX 6200 Surfscan #9199098 for sale

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ID: 9199098
Wafer Size: 8"
Vintage: 1995
Wafer inspection system, 8" Cleaning & Wipe-down With IPA Puck height Laser & Optical alignment 18 Mil thick wafers System belts Vacuum lines Ribbon cables DC Power supply Laser power supply: GP / IO Program Wafer indexers: 6" to 8" Adjust both the left and right Through beam voltage: 3.0 V DC Measurement electronics: INSW Particle Haze PCB's Clean & Lube the wafer robot Sort-cam Left & Right lead screws Scan mirror alignment: OEM Specification: 20um/sec EDS and XlY Up to 200mm capable Manual cassette load onto elevator Defect sensitivity: 0.09um at 80% Capture rate Ar ion laser wavelength: 488nm Blower unit R&D Activity Operating system: Windows 3.11 / KLA 4.0 1995 vintage.
KLA / TENCOR / PROMETRIX 6200 Surfscan is a high-precision wafer testing and metrology equipment. It is designed to address the development challenges of large-scale wafer processing technology and to provide reliable measurements of critical device characteristics. Before the advent of KLA 6200 Surfscan, a great deal of labor and time was required to inspect each individual wafer, find defects, and understand their root causes. TENCOR 6200 Surfscan allows for reliable characterization and testing of wafers, enabling manufacturers to better understand the performance of their products, easily identify defective wafers and devices, and improve their process control. The system offers fast, accurate, and repeatable measurements across a diverse range of materials and wafer flatness or non-planarity applications. This speed and accuracy help manufacturers minimize the turnaround time for evaluating their process parameters. Furthermore, 6200 Surfscan uses advanced optical imaging and wafer tracking systems to achieve highly precise measurements and deliver data with greater integrity. The unit also provides operators with automated routines, such as particle counting, data capture, metrology, and other measurements, that can be used to identify potential issues with the wafer structure, the electrical properties of the devices, or contaminants on the wafer surface. It also includes advanced defect detection capabilities such as Darkfield Mode to find foreign particles on the wafer surface. The machine also offers unsurpassed surface topography analysis capabilities using parameters like a line scan, FFT, 3D profile, and amplitude both in Z and X, Y axes modes. In addition, PROMETRIX 6200 Surfscan offers high sensitivity for non-planar (3-D) topography and texture measurements. This is possible using advanced algorithms that detect fine differences at a micro level. The tool is also capable of rapidly scanning a wide range of materials, from bulky specimens to epi substrates. KLA / TENCOR / PROMETRIX 6200 Surfscan is revolutionizing wafer testing and metrology by providing a comprehensive, fast, and repeatable way to measure, characterize, and classify wafers. With its advanced features and capabilities, it is helping wafer processing industries improve process control and become more efficient as well as cost-effective.
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