Used KLA / TENCOR FT-500 #9214047 for sale

KLA / TENCOR FT-500 is an advanced wafer inspection and metrology system that offers advanced capabilities including inline defect review, high throughput, and high resolution imaging. Specifically, KLA FT-500 provides a total of 500 wafer aligners, allowing up to 8 wafers per hour per station and accommodating 12", 8" and 6" wafers. Through integrated optics and LEDs, it can generate image resolution up to 1.6um and a maximum field of view of 500mm. TENCOR FT-500 is equipped with the Automated Defect Review (ADR) system that enables inline automated defect review and provides visual representations of inferred parameters like CD, line edge roughness and any other local or global parameters. Additionally, it also supports various optical techniques for CD measurements, and enables simultaneous wafer-to-wafer M1 (layer or measurements) matching. In terms of illumination, FT-500 employs advanced lighting options such as high-resolution brightfield, darkfield, backlighting, and epi-illumination, along with an array of LEDs and filter options to capture any variable wafer patterns. Moreover, its automatic beam profiler and scan parameter adjustment allow facilities to control beam conditions and obtain uniform scans. As for image analysis and enhancement, KLA / TENCOR FT-500 has advanced capabilities including automated feature search, image sharpening, image segmentation, and automated feature classification. In addition, it also includes image measurement tools such as measurement graphics and tools to improve image recognition accuracy. In terms of throughput, KLA FT-500 is capable of performing up to 1000 wafers per hour when running in batch mode, while in scan mode it can handle up to 20 wafers per hour. To further optimize throughput performance, it also has an auto-defect detection capability which helps reduce set-up time. Finally, TENCOR FT-500 comes with a wide range of accessories and components for convenient setup and maintenance. Overall, FT-500 inspection and metrology system provides the highest level of accuracy and throughput for wafer inspection and metrology. With its advanced illumination, image analysis, and measurement tools, it is designed to improve yield and reduce cost.