Used KLA / TENCOR FT-750 #69314 for sale

KLA / TENCOR FT-750 is a wafer testing and metrology equipment, specifically designed for front-end production processes up to 200 mm, designed to provide precision and accuracy required for demanding etch and patterning applications. The highly automated system can analyze a variety of defect types including sub-surface line, overwidth, and missing line defects, as well as measure linewidth, film thickness and surface resistance. KLA FT-750 wafer testing and metrology unit is built on the concept of a true imaging CDSEM which combines superior resolving power, superior pattern contrast and a wide contrast range which ensures accurate defect detection. TENCOR FT 750 machine utilizes advanced high-resolution optics, providing resolutions up to 0.20 microns. The tool contains an automated vacuum pod which creates a constant high vacuum for fast sample exchange, increasing throughput. FT-750 includes a die-to-die automated wafer mapping tool as well as advanced software tools such as multicriteria evaluation algorithms, allowing for detailed analysis of a wide variety of defect and process characteristics. KLA / TENCOR FT 750 also offers powerful depth profiling, an important feature enabling users to get a full picture of the sample, maximizing defect investigations and process control. The asset is designed to be configurable and expandable, allowing users to customize and upgrade the model to meet their needs. KLA FT 750 equipment is highly reliable, thanks to features such as de-dusting algorithms which enable the system to operate at the highest performance level and reduce wafer breakage. The unit also includes an indexing table and auto-lift contactor for high-throughput measurements. An open interface allows FT 750 to be easily integrated into an existing process monitoring platform, providing operators with detailed information on wafer condition. In summary, TENCOR FT-750 is a highly-reliable, automated wafer testing and metrology machine designed to support front-end production processes up to 200 mm. The tool provides resolution up to 0.20 microns, customizable and expandable configurations, defect detection and process control, and an integrated interface, making the asset suitable for any production environment.