Used KLA / TENCOR / PROMETRIX RS-35C #9281758 for sale
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ID: 9281758
Wafer Size: 2"-8"
Resistivity mapping system, 2"-8"
4-Points probe
Vacuum: 300 mm HG
Hard Disk Drive (HDD)
PC
Color monitor
XY Pattern test
Measurement range: 5 mΩ to 5 mΩ
Maps: Average, difference, and ratio
Calibration curves and correlation equations
Trend and SQC charts
Data import and export
ASCII Copy to diskette
Measurement options: Mapping (Up to 625 sites)
Qualification test:
Contour maps
3D Maps
Diameter scans (Up to 625 sites)
Quick tests: Standard and user-definable tests (Up to 30 sites)
Accuracy:
± 0.2% (Standard resistor)
± 1% (NIST Wafer)
Repeatability : <0.2% (1 sigma)
Power supply: 115 / 230 V, 8 A, 50/60 Hz.
KLA / TENCOR / PROMETRIX RS-35C is a state-of-the-art wafer testing and metrology equipment that provides comprehensive analysis and fault detection capabilities. It is designed to be used in advanced process characterization environments, such as semiconductor fabrication and related industries. The system is equipped with a range of automatic, non-automatic and semi-automatic modes that enable users to quickly analyze and process wafers. The unit incorporates advanced high-resolution imaging technology with sophisticated metrology capabilities, including contrast enhanced imaging, defect inspection, automated defect classification and defect detection. This machine also enables users to perform a range of automated measurements, such as line widths, critical dimension measurements, overlay measurements and on-wafer stress measurements. The integrated lithography capabilities enable users to create precise patterns across the entire wafer area. Another key component of the tool is its on-board analysis tools. KLA RS-35C utilizes a range of software packages to help users to analyze their data. Tools such as the Wafer Mapping Asset, Simulator/Analyzer, and Data Reviewer allow for easy and comprehensive inspection of the wafer surface. Additionally, the model utilizes integrated graphical user inputs for parameter optimization, as well as featuring a range of analysis algorithms for defect detection and analysis. Using TENCOR RS 35C enables users to accurately and rapidly gather relevant process data. Furthermore, this data can be combined with other sources of data to create comprehensive metrics that enable users to optimize their process control parameters. This equipment also enables a high level of adherence to established quality standards, due to the precise detection and measurement capabilities that are present. Overall, RS 35C is a highly capable wafer testing and metrology system, enabling users to gather process data quickly and accurately. Its range of automated and non-automated features, combined with the high resolution imaging and metrology capabilities, make it an ideal solution for advanced process characterization environments.
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