Used KLA / TENCOR / PROMETRIX RS-55/TC #46197 for sale

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KLA / TENCOR / PROMETRIX RS-55/TC
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ID: 46197
Four (4) Point Probe Resistivity Mapping System with Temperature Compensation and Wafer Handler Stainless steel clean room version Cassette to cassette measurement Display modes include contour maps, 3-D plots and diameter scans Can compensate sheet resistance measurements against ambient temperature and materials TCR Accommodates wafers up to 8" 115V, 50/60 Hz.
KLA / TENCOR / PROMETRIX RS-55/TC is a wafer testing and metrology equipment specifically designed for the semiconductor and optoelectronic industries. This advanced equipment is used for production and development applications, including chip testing, packaging, process monitoring and quality control. The software of KLA RS-55TC system enables the control of production process parameters, including position, focus, scan mode and illumination. TENCOR RS55/TC is equipped with a 1 to 2 inch wafer scanning stage, capping module, wafer scanning station and integrated camera technology. This advanced testing unit has the capability to measure 4D (Dimension,Die Size,Thickness) , 2D (X/Y), pixel array analysis and critical dimension analysis with superior accuracy and repeatability. Additionally, this machine features a patented high-resolution digital imaging tool which combines in-plane resolution of up to 0.1µm with a range measure accuracy of up to 5µm for extremely precise measurements. TENCOR RS-55 / TC is also equipped with an advanced automation asset. The Automated Wafer Fragmentation feature allows automated wafer segmentation and can accurately identify and distinguish performing from non-performing dies. This model has the ability to analyze optical properties such as shape and color, metal geometric features such as trench shapes, analysis of critical dimensions and measuring image contrast and focus. Finally, RS-55TC also features an intuitive user interface. This user interface gives the operator simple access to vital equipment functions and allows for effortless adjustment of configuration options. The open architecture of the system makes it compatible with other manufacturing automation software, giving it a great degree of flexibility. Overall, PROMETRIX RS55/TC is an incredibly versatile and precise wafer testing and metrology unit. It has the capability to measure 4D, 2D, pixel array analysis and critical dimension analysis with an extremely high accuracy and repeatability. Additionally, the automation machine and intuitive user interface increases the flexibility of this equipment, making it ideal for a wide range of applications across the semiconductor and optoelectronic industries.
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