Used KLA / TENCOR / PROMETRIX RS-55/TC #195934 for sale

KLA / TENCOR / PROMETRIX RS-55/TC is a wafer testing and metrology equipment used to analyze and measure semiconductor wafers. It is designed to examine and inspect semiconductor-level features, such as bumps, lines, non-uniformity, and feature size. The system is based on advanced optical technology and is capable of rapidly and precisely detecting various dimensions and defects on wafers. KLA RS-55TC can be connected to an automated wafer-handling unit (AWHS) and used to inspect and measure wafer surfaces and features. The machine is equipped with Auto-Focus Tilt camera and Dual Telecentric lenses. The auto-focus tilt camera allows the tool to capture high resolution images of the sample. The dual lenses have an adjustable depth-of-field and can capture images of different focal planes. TENCOR RS55/TC is capable of obtaining 3D data and surface topology measurements of wafers. It can measure bump height, size, and shape, as well as line widths, pitches, and CD (Critical Dimension) values. The asset can also detect variations in line widths and spacings, as well as analyze features for uniformity. Various analysis techniques are used to measure features on wafers, including SEM (Scanning Electron Microscopy), optical microscopy, SEM-AFM (Scanning Electron Microscopy-Atomic Force Microscopy), and white light interferometry. The model utilizes a combination of these techniques, including advanced algorithms, to detect defects and variations on wafer surfaces. TENCOR RS-55TC has the ability to measure various types of materials, such as silicon, copper, aluminum, gold, and other types of metals. The equipment can also analyze organic materials, which makes it suitable for a wide range of applications. The system provides high throughput and fast inspection speeds. It is also equipped with an easy-to-use interface which makes data acquisition and report generation simple and fast. In summary, TENCOR RS-55/TC is a cutting-edge wafer testing and metrology unit designed to inspect and measure semiconductor wafers. The machine utilizes advanced optical technology and utilizes tailored analysis techniques to detect defects and variations. With its capable suite of features, rapid throughput, and easy-to-use interface, KLA RS-55/TC is an ideal choice for inspecting and measuring wafer surfaces.