Used KLA / TENCOR / PROMETRIX RS-75 #156087 for sale

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KLA / TENCOR / PROMETRIX RS-75
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ID: 156087
Wafer Size: 8"
Resistivity measurement system, 8".
KLA / TENCOR / PROMETRIX RS-75 is a state-of-the-art wafer testing and metrology equipment for advanced process control and failure analysis. This system offers unparalleled insight into the condition and performance of wafers, and its advanced capabilities provide significant advantages in process control and quality assurance. KLA RS75 unit is based on an ergonomic gantry design that enables highly accurate and repeatable measurements with a wide range of options for wafer diameters and thickness. The machine's advanced wafer handling capabilities provide precise, repeatable alignment with multiple sensors, including laser scanners and other sensors capable of real-time measurement of both surface and sub-surface properties. It has a high speed scan/measurement mode with an adjustable field of view that provides a wide range of defect-related information. TENCOR RS 75 also features a range of metrology capabilities including critical dimension measurements, surface scanning and defect review. Its proprietary defect-detection algorithms provide unmatched defect resolution and analysis. RS75 tool is equipped with a suite of functionality that provides maximum flexibility and control over process parameters. It has multiple I/O channels, and an array of advanced automation features including automatic process setup, data storage and analysis, adjustable scanning parameters, data plotting, and statistical analysis. PROMETRIX RS-75 asset also offers a wide range of defect classification options, from basic reject/accept decisions to more sophisticated classifiers such as defect measurement categories and fault-tree analysis. It also includes a powerful pattern-recognition engine, allowing advanced inspection and failure analysis of wafers at the highest resolution. Overall, PROMETRIX RS 75 wafer testing and metrology model provides unparalleled insight into wafer condition and performance. Its advanced automation capabilities and defect-detection algorithms make it ideal for process control and quality assurance, while its wide range of defect classification options provide unmatched flexibility and control. KLA RS-75 equipment is a state-of-the-art tool for the most demanding process control and failure analysis applications.
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