Used KLA / TENCOR / PROMETRIX RS-75 #197154 for sale

KLA / TENCOR / PROMETRIX RS-75 is an advanced wafer testing and metrology equipment designed to support the latest process control and quality assurance/control needs for the semiconductor industry. Offering precision and accuracy across a range of sub-micron critical dimensions, KLA RS75 is the ideal solution for advanced process control and critical dimension metrology. The system is equipped with integrated metrology, testing, process control and fault diagnostics capabilities, enabling quality assurance/control without compromising total throughput. Its advanced optics are capable of sub-micron measurement of critical features individually or in batch mode, meaning the device can be used with full trust quality assurance or process control. The unit combines image processing and pattern recognition to make automated measurements from wafer-level images that are integrated with data from all production equipment. TENCOR RS 75 comprises several components, including an automated wafer loader to minimize manual labor, as well as a wafer mapping module to enable detailed inquiry of test results from any wafer in the lot. The machine's precision enables results that are consistent across different brands of wafers, while the flexible interface makes it easily configurable for various production processes. Its tool console facilitates data collection and analysis for process control and fault diagnosis. It also has the capacity to measure small features, including single line edge roughness and contact hole/spacing on state-of-the-art wafers. PROMETRIX RS-75 is also equipped with an auto alignment feature, enabling maximum accuracy and repeatability. This is critical for complex applications that require multiple measurements and processes. The asset is also equipped with a high-resolution color camera, capable of providing color images of the wafers. The model facilitates rapid and reliable sample preparation, with no manual intervention, enabling maintaining sample quality and security. It also features extensive throughput and capability to automate multiple processes with accuracy and increased throughput. In summary, RS-75 is an extremely advanced wafer testing and metrology equipment that meets the most demanding performance and process control requirements. Its precision and accuracy, combined with its flexible interface and high resolution imaging, make TENCOR RS-75 an ideal system for the semiconductor industry.