Used KLA / TENCOR / PROMETRIX RS-75 #9296599 for sale

KLA / TENCOR / PROMETRIX RS-75 Wafer Testing and Metrology Equipment is a fully automated, high throughput solution designed to address the challenging demands of semiconductor process and device characterization. KLA RS75 offers an integrated set of optical metrology tools, including critical dimension (CD) measurement, wafer shape (WS) measurement, surface texture (ST) measurement, and process control. TENCOR RS 75 works by directing lasers across the wafer and collecting data points via a pyramidal mirror. This advanced optical scanning system is capable of measuring to sub-micron resolutions. The robust optical subsystem is combined with an automated, material handling platform that supports and moves the wafer to different locations for further analysis. Additionally, the unit utilizes state-of-the-art alignment and positioning techniques that provide sub-micron repeatability. Equipped with advanced analysis software, TENCOR RS75 can rapidly collect a wide range of characteristics and generate complex 3D maps and graphics. This highly accurate machine provides accurate and repeatable measurement results in a fraction of the time compared to traditional manual techniques. Used in fabs worldwide, RS75 is relied on to identify potential process excursions before they result in a yield loss. The real-time process information enables proactive control of the data collection and subsequent analysis, which significantly reduces the time to identify and characterize potential process excursions. With its high throughput, fast turnaround, and superior level of data integrity, PROMETRIX RS75 offers an excellent solution for measuring wafers for process control and device characterization.