Used KLA / TENCOR SP1-DLS #9012564 for sale

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KLA / TENCOR SP1-DLS
Sold
ID: 9012564
Particle measurement.
KLA / TENCOR SP1-DLS is a comprehensive equipment designed to provide the most accurate and highest resolution mask and wafer inspection available. It incorporates proprietary technologies to deliver defect inspection within a single platform and offers the best performance in its class. The system combines SAQS (Sub-pixel Accurate Quantum Sensing) with advanced imaging optics to ensure unparalleled accuracy in the detection and analysis of defects on the wafer and mask surfaces. The unit utilizes spatially modulated illuminations, parallel imaging processing and proprietary algorithms to pinpoint defects on the wafer that are less than 10 nanometers in size. KLA SP1 DLS then accurately locates defects with a resolution that is better than 1 nm, allowing full inspection of the entire wafer for defects that would otherwise be difficult to detect by traditional inspection methods. The machine also has the ability to rapidly share wafer/mask images between different sites, making it easy to diagnose problems and enable faster repair. The tool also enables users to create an automated database containing all of the defects discovered in order to effectively present the defect data to the fab. The asset also includes inspection and analysis software that allows for rapid analysis of all defects within the single platform. The software allows users to automate inspection processes, analyze the characteristics of the defect, and make decisions on further action. In addition to the sharp detail of the inspection model, TENCOR SP 1-DLS has the ability to deliver non-destructive inspection, allowing users to perform repeated wafer and mask inspections, without any damage to the wafer or mask surface. Finally, SP 1-DLS is also designed to integrate with other KLA systems for a seamless inspection and repair experience.
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