Used KLA / TENCOR SP1-DLS #9256586 for sale

ID#: 9256586

Manufacturer:

KLA / TENCOR

Model:

SP1-DLS

Vintage:

2004

Wafer Size:

12"

Equipment Details:

Unpatterned surface inspection system, 12"
With (2) ASYST IsoPorts
Edge handling
Loader type: Dual FIMS, 12"

BSIM (Flipper and ECWA)
Robot
BF Laser

2004 vintage.
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