Used KLA / TENCOR SP1-TBI #9250876 for sale

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ID: 9250876
Wafer Size: 8"
Vintage: 2007
Unpatterned wafer inspection system, 8" 4-Station Open cassette type (Not SMIF) Operating system: Window NT 850 MB Includes: BROOKS Robot BROOKS Handler 2007 vintage.
KLA / TENCOR SP1-TBI is a mask and wafer inspection equipment that offers automated defect detection. The system consists of an optical head that includes a charged coupled device (CCD) image detector, acquiring high resolution images and diffraction data from a wafer or mask. The acquired data is then analyzed with specialized image analysis software, allowing engineers to inspect the wafer for possible defects. KLA SP1T-BI unit provides operators with an easy-to-use user interface, making it simple to navigate and operate. The machine can be programmed to inspect a single die, multiple dies or an entire wafer. It features a powerful CCD detector for high resolution imaging, along with a range of illumination options, such as darkfield, brightfield, contour illumination, polarizers and filters. These features enable analysis of features that range from nanoscale size to macro-scale. TENCOR SP1 TBI considers all sampling elements when conducting its inspections. The automated defect detection software determines if a potential defect is a random particle or a specific, process-generated feature, such as a hillock or via. Samples can be archived for future reference or further detailed analysis. KLA / TENCOR SP1 TBI also has an optional integrated optical profilometer, which further enhances its capabilities. The profilometer allows for advanced topography and shape measurements when analyzing defects, allowing for better defect classification. The integrated software for TENCOR SP 1 TBI offers extensive setup and reporting features, in addition to tiered defect classification. These features reduce the time required to inspect and characterize defects. Furthermore, various built-in report templates allow for quick and easy reporting on inspection results. KLA SP1 TBI also offers a suite of advanced tools, such as CameraLink and Ethernet communications, and a host of interactive tools. These further reduce the time required for inspection and characterization of defects. In summary, KLA / TENCOR SP 1-TBI is a reliable and efficient mask and wafer inspection tool. The asset provides users with a robust set of features, enabling high resolution imaging and automated defect detection. Its integrated profilometer further enhances its capabilities, with advanced topography and shape measurements providing better defect classification. The user-friendly user interface and extensive reporting features make SP1T-BI an excellent choice for high accuracy mask and wafer inspection and characterization.
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