Used KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600B #9225845 for sale

KLA / TENCOR / THERMA-WAVE OPTIPROBE 2600B is a wafer testing and metrology equipment designed specifically for semiconductor fabrication. The system provides a comprehensive suite of metrology and Inspection tools for next-generation metrology challenges while offering high throughput and low overhead. The unit has an impressive suite including SEMI standard measurements, overlay, CD-SEM, wafer defect and low-voltage non-destructive testing. KLA OPTIPROBE 2600B comes with a 5-axis motorized stage for inspection, servo-controlled rasters, and up to three motorized microscopes for both in-line and off-line processing. The machine is designed with a modular architecture which can accommodate up to 10 µm resolution on 200 mm and 300 mm substrates, scanning an area of 900 mm by 1200 mm. The tool uses a patented 2D and 3D image algorithms to provide accurate measurement and analysis of line widths and spacing, edge placement, overlay issues, topography, waveform, and contours. It also provides data from powerful defect-detection tools for both clean and non-clean wafers. The proprietary ODCX-3D patented process-aware and device-aware defect inspection software locates the embedded as well as the peripheral defects, and provides fast analysis and reports. Furthermore, the patented TENCOR OPTIPROBE 2600B utilizes the PRT pattern recognition technology to identify and report process-sensitive defects. The Insight complete wafer testing and metrology software platform provides a comprehensive suite of process-sensitive and DFM sensitive applications to inspect for all the major manufacturing and packaging defects. THERMA-WAVE OPTIPROBE 2600B is designed for fast and high accuracy measurements. It uses advanced image processing techniques to decode edge placement and overlay issues with sub-nanometer accuracy. Moreover, it is able to automate the routine tests for time-intensive tasks as well as complex jobs, and transfer the data automatically to software systems for further analysis. The OPTIPROBE asset provides three major advance features, such as an integrated process control station, enhanced web services, and off-line operation mode. It also offers remote access and secure control via secure web services. The model is perfectly designed for today's advanced process and manufacturing requirements.​