Used MITUTOYO SV-C500 #162851 for sale

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ID: 162851
Profilometer.
MITUTOYO SV-C500 wafer testing and metrology equipment is a comprehensive platform designed to enable granular control of critical dimensions and uniformity across complex devices. The platform provides in-process optimization of critical parameters for successful production of advanced technology nodes, such as 3D-NAND, DRAM and FINFET devices. The system offers a variety of features that enable high throughput and flexible process control to meet the demands of modern device production. SV-C500 leverages a high-speed linear drive stage coupled with a high-performance 5-axis wafer stage. This advanced mechanism allows for precise control of wafer movement, with accuracies of 4.5 µm for X/Y directions and 4.4 µm for Z direction. The open platform apparatus also enables an optimized workflow, allowing for multiple monitoring and measurement methods to be employed simultaneously within the same unit. This includes process tuning, metrology, analytical operations, and quality control. In addition to its advanced handling mechanism, MITUTOYO SV-C500 is also equipped with various powerful metrology tools. These tools make use of the machine's air-bearing assembly to measure static and dynamic parameters of advanced semiconductor devices. The tool offers a wide array of automatic and manual probes, including both scanning electron microscope (SEM) and atomic force microscopy (AFM) capabilities. These tools offer high resolution imaging and measurements, with resolutions of up to 0.5nm for SEM and 1nm for AFM. SV-C500 is also capable of a variety of other measurements and analyses. Its algorithms are capable of performing image identification, chip size analysis and 3D measurements. This asset's large library of measurement techniques also include several non-destructive techniques, such as ellipsometry and photoluminescence, to provide high precision analysis. Overall, MITUTOYO SV-C500 wafer testing and metrology model is a powerful and versatile solution for advanced semiconductor fabrication. Its comprehensive set of capabilities and tools allows for comprehensive monitoring and measurement of critical dimensions and uniformity parameters across complex devices. With its high-speed linear drive stage, air-bearing assembly and wide range of metrology tools, the equipment delivers high precision results that are essential for successful production of modern technology nodes.
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