Used THERMA-WAVE OPTIPROBE 3260 DUV #9004644 for sale

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THERMA-WAVE OPTIPROBE 3260 DUV
Sold
ID: 9004644
Vintage: 1997
Film Thickness Measurement system Computer and monitor included No Cognex board No hard disk Can be inspected 1997 vintage.
THERMA-WAVE OPTIPROBE 3260 DUV is a high-end contactless type wafer testing and metrology equipment designed to be used in processes associated with advanced integrated circuit (IC) technology. It utilizes a unique all Angle-dependent Phase Measurement (APM) imaging technology to measure, in real-time, the physical properties of a wafer. It is used to accurately measure physical properties, such as etch height profiles, reflectivity profiles, dielectric stacks, etc. These physical property measurements allow for the optimization of many important parameters in wafer IC fabrication processes. THERMA-WAVE OPTIPROBE 3260DUV is capable of measuring up to 16 different IC materials, including silicon, gallium arsenide (GaAs), germanium (Ge), and tantalum oxide (Ta2O5). It features a Quad detector array to ensure that accurate measurements can be taken from multiple angles of a wafer. This is an invaluable feature in semiconductor processes that require high levels of precision and accuracy. The optical system has a wavelength range of 193-1535 nm, ensuring measurements over a wide range of materials and applications. In addition to this impressive optical unit, OPTIPROBE 3260 DUV also features an integrated scan head that can measure up to four wafer probing points in a single scan. This is an ideal choice for applications involving multiple process steps or the verification of wafer measurements. The scan is also able to generate an algorithmically optimal scanning pattern to ensure accurate and repeatable measurements each time. Furthermore, OPTIPROBE 3260DUV also offers many other advantages, such as the ability to take measurements for wafers with different thicknesses, perform heavy parallelism scanning processes, and filter out noise from the signal. The advanced built-in control software, which is compatible with various kinds of data analysis and control systems, also provides a high level of flexibility and automation. This ensures an enhanced measurement accuracy, repeatability, and reliability. To sum up, THERMA-WAVE OPTIPROBE 3260 DUV offers a comprehensive and advanced wafer testing and metrology machine. Its Quad detector array, wide wavelength range, and integrated scan head allow for highly accurate and reliable measurements over multiple angles and process steps. Furthermore, the integrated control software ensures an optimized scanning process and higher levels of automation. This makes THERMA-WAVE OPTIPROBE 3260DUV an ideal choice for advanced IC fabrication processes.
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