Used FSI / TEL / TOKYO ELECTRON Magellan #9400272 for sale

FSI / TEL / TOKYO ELECTRON Magellan is a wet processing station designed to meet the requirements of the semiconductor industry. It is designed to be used in applications such as spin-on-dielectric, lift-off, etching and deposition. FSI Magellan is capable of processing large substrates, up to 400 x 500 mm in size. TEL Magellan is capable of performing various advanced lithography processes such as high aspect ratio gap-fill, lift-off and stiction control. It has a precision dual-axis optical stage, with a maximum translational speed of 0.5 μm/sec and a positioning accuracy of 1.5 nm. The stage can support wafers from 1 inch up to 8 inch with a handling force of up to 1.5 N. Magellan is outfitted with an award-winning e-beam lithography equipment for precise timing control. The integrated system is compatible with a variety of programmable power electrodes, enabling precise voltage and current combination. The unit is capable of providing high resolution images with a maximum resolution of up to 5.5 μm. TOKYO ELECTRON Magellan is compatible with a number of different single-wafer process chemistries such as aqueous, organic, and toxic. The station is also equipped with various automated wet chemical processes such as scrubbing, etching, and deposition. The integrated automated machine is capable of running high volume processes with precise control. Additionally, the station is equipped with comprehensive safety and environmental protection equipment. FSI / TEL / TOKYO ELECTRON Magellan is designed for maximum productivity and to facilitate error-free processing with fast turnaround. The station is user-friendly and offers quick and simple installation. The station also offers intuitive operation with a variety of features including recipe management and process monitoring. FSI Magellan is supported by FSI 'Easy-to-Use' software, which enables the user to develop their own process recipes and store data. TEL Magellan is a multi-functional wet station that is capable of providing a full range of processes from simple etching to highly complex lithography. It is designed to support high-volume and high-accuracy applications and can facilitate fast production turnaround. Magellan also offers a user-friendly interface along with comprehensive safety and environmental protection measures.