Used SANKYO WH80 #293608546 for sale
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ID: 293608546
Wafer Size: 8"
Vintage: 1996
Wet oxide station, 8"
Oxide etch wet bench
VERTEQ SRD
Chuck clean bath (PVC)
Touch panel
(4) Chemical baths (PTFE)
(4) Circulation pumps
(4) Dampers
(4) Heat exchangers
GEM Controller
F/R Bath (QUARTZ)
(2) O/F Baths (QUARTZ)
(4) Circulation lines
(4) Valves
(4) Filter housings
PC
Handler system:
(2) Wafer transfer systems
(2) Stocker robots
(3) Transfer robots
Transporter
Transformer
UPS
Factory interfaces:
(2) SMIF
1996 vintage.
SANKYO WH80 wet station is an all-in-one machine for wet-processing of semiconductor wafers. It is designed to provide the utmost in accuracy and reliability for key processes such as photoresist coating, development, metrology, and post-processing. This equipment features an intuitive user interface, a wide range of customizable automation options, and advanced control software, making it a great choice for high-end semiconductor production lines. The machine is equipped with a controller and an intelligent robot, which move the substrate from station to station. This machine has a mainframe with a number of interchangeable arm and nozzle assemblies, allowing for flexibility in substrate handling. The mainframe also includes a wafer cleaning station, a routing station, and a gate station, which control and route the wafer. At the photoresist coating station, the wafer is automatically coated with photoresist and spin dried. The development station is capable of developing a range of resist profiles, including thin and hard resists, edge bead resists, and negative resists. The machine is also capable of cleaning and drying the wafer, as well as providing a wet chemistry station, a sludge filtration station, and an annealing station. WH80 wet station also features a comprehensive metrology system that can be used to measure various parameters of wafer production, such as wafer size, resistivity, etch depth, and surface roughness. The unit also provides detailed analysis data such as overlay performance and process repeatability. The machine is connected to the control software, which allows users to remotely control its functions. Additionally, the software can be used to optimize the production process, thanks to its built-in optimization algorithms. SANKYO WH80 wet station is an invaluable tool for semiconductor manufacturers, providing an all-in-one solution for wet-processing. It is a reliable, cost-effective tool that offers top-tier performance and accuracy. With its wide range of automated options, comprehensive metrology capabilities, and user-friendly design, WH80 wet station is an excellent choice for efficient production runs.
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