Used CAMECA TXRF 8300 #9224127 for sale
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ID: 9224127
Vintage: 2007
System
Specimen chamber and wafer handling:
Mini environment, class 1
Automatic centering and flat / Notch identification
Automatic thickness variation compensation
Automatic angle adjustment
Independent from wafer bow or wedge
Polar orientation independent of analyzed area
X, Y, Z, Θ, Φ Wafer stage
No vacuum chamber
Organic chuck material
Vacuum chucking during wafer displacement
X-Ray system with:
Motorized curved double multi layer monochromator
Measurement of elemental impurities on Si-wafers
Simultaneous measurement of >60 elements between Al and U
Detection limits: < 5 x 109 atoms / cm² (e.g. for Ni)
Angle adjustment of wafers to optimize signal / Background ratio
Medium frequency x-ray generator, max. 3.5 kW
High power fine-focus tubes
System prepared for W and Mo tubes
Sealed anode system
Lifetime: 2,000 Hours
SiLi Detector:
With crystal: 80 mm²
Effective sampling area: 70 mm²
Energy resolution better: 150 eV
Selectable time constants for variable resolution
Digital detector electronics
Digital pulse processing
4096 Channels ADC for spectrum analysis
Pile-up rejector
Escape peak subtraction
Standard calibration wafer
Standard droplet
Ni: 1ng
Computer control system:
PC With 256 MB RAM
FDD: 1.4 MB
CD Burner
HDD: 100 GB
TFT Monitor, 17”
16 MB Monitor adapter with hardware acceleration
Ethernet card: 10 / 100 MB
Operating system: Windows NT
Color ink printer
Graphical User Interface (GUI)
Easy set-up of measurement sequences
Break function for introduction of emergency measurements
Automatic optimization of filter setup
Individual selection of analyzing parameters
Automatic search routine for VPD droplets
E-Diagnostics and remote servicing
Fab automation
GEM SECS
Modem included
Cassette stations:
(2) Cassette stations, 6"-12"
Front and side port
Mix and match operation
Different wafer sizes in an automatic run
Clean room compatible cassette operation
X-Ray tubes:
W-Tube: 3000 W
Excitation energy: Wlb: 9.67 keV / Wla: 8.40 keV
Typically used for elements between Al - Zn and Nb - Ta
Chiller: Separate water / Air or water / Water chiller
Detector:
Model no: 7163
Resolution: 150
Detector HV bias: -500 V
Cryostat:
Capacity: 7.5 Liters
Consumption rate: <1 Liter / day
Pre-amplifier:
Type: OXFORD
Sensitivity gain: 1.6 mV / keV
FET Configuration:
Substrate voltage: -16.9 V
Heater voltage: 4.5 V
Spare parts included:
PLANAR / Multi layer block standard
Translink PCI card
Limit switch for DMT 100/65
Digital vacuum switch / Sensor
OXFORD / ISIS 300 DXP 50 Detector
Digimic for assembly 5001 u 5002.00.00 hub: 10 mm
M-521.2S Linear
Turntable DMT 100 mit motor PK244-02B
MY-COM / C30/200 Precision switches
DETECTOR ELECTRONIC / 5885/7163 Without translink card
OMRON / Micro switch DSF
OMRON / MY-COM Switch
Wafer dish / Mess chuck
2007 vintage.
CAMECA TXRF 8300 is an X-ray Fluorescence (XRF) equipment which is perfect for trace element characterization. The X-ray fluorescence spectrometry technique utilizes an X-ray beam to excite the target sample into an emission of characteristic X-rays which are then measured to determine the element composition of the sample. This technique is ideal in many situations where a non-destructive and elemental-specific analysis is required. TXRF 8300 combines X-ray fluorescence spectrometry with advanced sample preparation capabilities, allowing researchers and technicians to meet their specific elemental measurement needs. The system packages an optimized high-power X-ray generator with integrated sample preparation capabilities, the latter being the key to achieving superior analytical performance. The combined unit offers unparalleled precision and accuracy for elemental concentrations ranging from ppm to high percentages. The sample preparation accessories, such as the Difficult Material Sample Kit (DMSK), make it possible to analyse challenging sample matrix and eliminate the requirement of tedious sample pre-sorting. The dedicated software package, xSort, includes the necessary capabilities to organize and optimize the XRF experiments. The xSort software helps by streamlining the data acquisition process, automatically selecting optimal measurement parameters, and then saving the measurement settings for future reference. Among the many features of CAMECA TXRF 8300 is its ability to characterize for many elements in a single measurement. This is possible due to the very small beam size which the instrument offers. The smallest beam diameter available from the machine is 120 μm, which is well-suited for detailed surface area analyses. Finally, the preconfigured service menu of measurement parameters is designed to allow scientists and technicians to analyze a variety of sample types with the highest degree of accuracy and efficiency. TXRF 8300 makes use of automated alignment techniques and intelligent software to precisely position the sample on the stage without manual intervention. In summary, CAMECA TXRF 8300 is the perfect tool for trace element characterization and X-ray fluorescence spectrometry due to its ability to provide unsurpassed precision and accuracy. With its integrated sample preparation capabilities, small X-ray beam size, and automated alignment and software capabilities, the asset is a great tool for scientists and technicians alike.
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