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385 RESULTS FOUND FOR: used Diffusion Furnaces & Accessories

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  • ASM: A412

    ASM A412 LPCVD Vertical furnaces, 12" Process: PH3 Doped poly/LPCVD Software version: 6.80C Heater type: MRL Loader configuration, 4 or 5 loader: 4 Quartzware configuration Outer tube: Quartz Inner tube: Quartz Boat: SiC boat Boat fix ring/Cap quartz: Quartz (6) Adiabatic plate (1) SiH4, Type (L-type, Straight, Diffuser, Shower): Multihole, U/D/L (1) O2, Type (L-type, Straight, Diffuser, Shower): Multihole, E (1) PH3, Type (L-type, Straight, Diffuser, Shower): Multihole, U/D/L Vacuum line configuration Design: Original config 10 Torr Baratron model: MKS 10 Torr Baratron full scale setting: 10(F/S) 1000 Torr Baratron model: MKS 1000 Torr Baratron full scale setting: 1000(F/S) ATM sensor model: MKS Vent valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger Check valve model: Fujikin Check valve resistance pressure: 2.26 Kpa Mainvalve type, Kitz or CKD: MKS Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003) Slow valve orifice size: 2.0mm (PV003) Pressure range of vacuum gauge(Inficon Pirani gauge): 10T Control table Alarm watch/table setting Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)) U: 0.7/0.7/30S CU: 0.7/0.7/30S C: 0.7/0.7/30S CL: 0.7/0.7/30S L: 0.7/0.7/30S Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)): 0.02/0.02/30S MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)) MFC1: N2: 2%/2%/10sec MFC2: N2: 2%/2%/10sec MFC3: N2: 2%/2%/10sec MFC4: N2: 2%/2%/10sec MFC5 SiH4: 2%/2%/10sec MFC6: SiH4: 2%/2%/10sec MFC7: SiH4: 2%/2%/10sec MFC8: 1%O2/Ar: 1%/1%/10sec MFC9: 5%PH3/N2: 2%/2%/10sec MFC10: 5%PH3/N2: 2%/2%/10sec MFC11: 5%PH3/N2: 2%/2%/10sec MFC12: ClF3: 10%/10%/10sec Transfer table Wafer charge command (charge/discharge) Side dummy (5) Upper (10) Lower (100) Product (5) Monitor (105) Product & Monitor Time 2nd Charge time(min): 0 Wafer cool time(min): 20min Leak rate table Base pressure low Limit(Torr): 1% Base pressure High Limit(Torr): 1% Leak Check check time(s): 60s Leak limit(Torr): 1% Retry Limit(count): 2 Loadlock settings Loadlock configuration O2 analyser model, NGK or Toray: PBI3.1 / PBI4.0 Process L/A Keep value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L Ready L/A Keep value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L Idle L/A Keep value (ppm): 10ppm N2 Flow max (L): 1300L N2 Flow min (L): 300L L/A O2 limit (ppm): 10ppm.
  • ASM: A 412

    ASM A 412 Vertical LPCVD furnace, 12" P / N: 2E0082-06-01 2011 vintage.
  • ASM: A 600 UHV

    ASM A 600 UHV Vertical furnaces, 8" Cluster tool controller Touch screen monitor Keyboard with trackball User interface Operating system: Windows NT Hardware system: Cluster platform module Cluster platform pump module CTC Computer cabinet Process module Process module pump cabinet Reactor: Reaction tube Method: Single tube Material: High-purity quartz Heater element: Heater wire material: Cantor wire, Ø 8 mm Normal operating temperature: 500°C to 700°C Maximum temperature: 800°C Equal heat length: 300 mm Temperature control: 500°C to 700°C ± 0.50°C Control circuit: Cascade Thermocouple: (4) Zones Inside: K-Type Outside: K-Type with ceramic protective tube Cooling method: Water-cooling, 2 l/min Wafer boat: Wafer size: Ø 200 mm Wafer quantity: 52 Wafer charges Material: High-purity quartz.
  • ASM: A400

    ASM A400 Diffusion furnace, 8" Process type: Main EQ Process name: HSG Poly Depo (6) Cartons Load port: BROOKS AUTOMATION Pump: KASHIYAMA AC Rack Loader type: SMIF Robot maker Blade type Handler type No per-aligner No mini-environment AC Distribution box No transformer No UPS No heat exchanger / Chiller Pumps Missing parts: Operation panel Robot Power supply: Voltage: 400 VAC, 3 Phase, 3 Wire + Ground Frequency: 50 Hz Full load AMP: 75 A Full load AMP continuous: 48 A AMP Rating of largest load: 35A 2003 vintage.
  • ASM: A400

    ASM A400 Vertical furnace, 8" (6) Cartons (3) Main modules BROOKS AUTOMATION Load port KASHIYAMA Pump AC Rack Loader type: SMIF AC Distribution box Missing parts: Operation panel Robot Power supply: Voltage: 400 VAC, 3-Phase Wiring: 3 Wire + Ground Frequency: 50 Hz Full load AMP: 75 A Full load AMP continuous: 48 A AMP Rating of largest load: 35 A No per-aligner No mini-environment No UPS No heat exchanger / chille 2003 vintage.
  • ASM: A412

    ASM A412 Furnaces.
  • ASM: A400

    ASM A400 Diffusion furnace, 8" Process type: Main EQ Process name: HSG Poly Depo (6) Cartons Load port: BROOKS AUTOMATION Pump: KASHIYAMA AC Rack Loader type: SMIF Robot maker Blade type Handler type No per-aligner AC Distribution box No transformer No UPS No heat exchanger / Chiller Pumps Missing parts: Operation panel Robot Power supply: Voltage: 400 VAC, 3 Phase, 3 Wire + Ground Frequency: 50 Hz Full load AMP: 75 A Full load AMP continuous: 48 A AMP Rating of largest load: 35 A 2003 vintage.
  • ASM: A 412

    ASM A 412 Vertical furnaces, 12" Dual reactors cure VDF: CU, PI WIP Module: Part number / Description 2945169-01 / Main frame WIP assembly 2379589-01 / Elevator chr 2947641-01 / Cassette stacker carousel 2944170-01 / Cassette transfer module 2947692-01 / Load port 2403641-01 / Pneumatic box 2947617-01 / WIP Flow box Reactor module (Base model info): Part number / Description 2330865-01 / Main reactor A412 frame assembly 2916177-01 / Reactor A412 top frame 2931303-01 / Reactor servo drive 2370387-01 / Reactor EMO / Motion 2931257-01 / BTC Box 2373718-01 / WTC Box 2909251-01 / R1 / R2 Controllers 2936550-01 / Reactor touchscreen 2327287-01 / Carousel bearing 2329999-01 / Carousel housing 2931222-01 / Carousel drive 2931109-01 / Reactor carousel 2379872-01 / Reactor fan 2936739-01 / A412 Gate valve 2997320-01 / Boat elevator A412 2972786-01 / Loader arm LP ROT 2936666-01 / O2 Analyzer reactor GEN 2366460-01 / N2 Purge generic 2330768-01 / TCU / TCF Generic 2330350-01 / VAC / PNEU Comp A412 Miscellaneous: Part number / Description 2895587-01 / (2) End effectors 242 CER 2927772-01 / N2-Purge 200 SLM assembly 2927810-02 / Reactor O2 analyzer 120 VAC 2405067-01 / Door opener 2nd GEN IC 2888025-01 / Transponder 2356341-01 / Press sens WHR single 2356333-01 / Press sens RC car Reactor chambers 1-2: Part number / Description 2995905-01 / Reduced exhaust ATM kit 2842939-02 / Process tube ATM NQ thin kit 2897334-02 / Door plate ATM LT H2 SS 2845644-02 / Wafer carrier NQ ATM 300 mm 2805847-01 / Thermocouples ATM BC 2954664-01 / Mount block FLG'S 2869764-01 / FLGS Proc / Door ATM MK 2806096-01 / ATM Scavenger purge 2864282-02 / Outlet no QTZ ATM H2-cure kit 2894564-01 / Heat exchanger RC1 / RC2 2996235-01 / Klixon heater element 2953927-01 / Heat ELEM ATM FR LT 2836343-01 / ATM Exhaust RC1 / RC2 120 V 2301652-01 / ELEC FLG'S ATM A412 2866048-01 / Heater outlet ATM 24 V 2955644-01 / GASP H2 Cure RC 1/2 2907860-01 / Intermediate H2 Cure RC 1/2 2310953-02 / INC GASL RC 1/2 901300 2865262-01 / H2 Sensing RC1 / RC2 2332108-01 / Pump TCU 2862255-01 / O2-Analyzer ATM H2 cure RC 1/2.
  • ASM: A400

    ASM A400 Diffusion furnace, 8" Process type: Main EQ Process name: HSG Poly Depo (6) Cartons Load port: BROOKS AUTOMATION Pump: KASHIYAMA AC Rack Loader type: SMIF Robot maker Blade type Handler type No per-aligner No mini-environment AC Distribution box No transformer No UPS No heat exchanger / Chiller Pumps Missing parts: Operation panel Robot Power supply: Voltage: 400 VAC, 3 Phase, 3 Wire + Ground Frequency: 50 Hz Full load AMP: 75 A Full load AMP continuous: 48 A AMP Rating of largest load: 35A 2003 vintage.
  • ASM: A 600

    ASM A 600 LPCVD Furnaces UHV Vertical furnaces Cluster tool controller Touch screen monitor Keyboard with trackball User interface Hardware system: Cluster platform module Cluster platform pump module CTC Computer cabinet Process module Process module pump cabinet Reactor: Reaction tube Method: Single tube Material: High-purity quartz Heater element: Heater wire material: Cantor wire, Φ 8 mm Normal operating temperature: 500°C to 700°C Maximum temperature: 800°C Equal heat length, 12" Temperature control: 500°C to 700°C ± 0.50°C Control circuit: Cascade Thermocouple: (4) Zones Inside: K-Type Outside: K-Type with ceramic protective tube Cooling method: Water-cooling 2 l/min Wafer boat: Wafer size, Φ 8" Wafer quantity: 52 Wafer charges Material: High-purity quartz Operating system: Windows NT.
  • ASM: VMP-100PRO

    ASM VMP-100PRO LPCVD TEOS BPSG System 1991 vintage.
  • ASM: A400

    ASM A400 Vertical furnace, 8" (6) Cartons BROOKS AUTOMATION Load port KASHIYAMA Pump AC Rack Loader type: SMIF No per-aligner No mini-environment AC Distribution box No transformer No UPS No heat exchanger / chiller Missing parts: Operation panel Robot Power supply: Voltage: 400 VAC, 3-Phase Wiring: 3 Wire + Ground Frequency: 50 Hz Full load AMP: 75 A Full load AMP continuous: 48 A AMP Rating of largest load: 35A 2003 vintage.
  • ASM: A412

    ASM A412 Vertical LPCVD furnace Currently warehoused 2013 vintage.
  • ASM: A 412

    ASM A 412 Vertical LPCVD furnace, 8"-12" Dual SiN process CE Marked 2011 vintage.
  • BRUCE: BDF-41

    BRUCE BDF-41 Stack oxidation CVD furnace, 6" Garden variety (2) Tube PolySi CVD (2) Tube LPCVD 1992-1993 Vintage.
  • BRUCE: BDF-41

    BRUCE BDF-41 Wafer diffusion furnace With (4) stacks Load station: HLF: Class 10 HEPA: Type 2 (4) Boatloaders: 7680 (4) Multi axis saddles (4) Atmospheric Door Support Assemblies (Quartz doors included) Scavenger / Furnace (10) Spike thermocouples: Type S (4) Intempos temperature control modules (1 / tube level) (2) LPCVD (2) Standard temperatures: 1250°C Maximum Source cabinet: Tube 1: Pyrogenic oxidation Tube 2: Pyrogenic oxidation Tube 3: LPCVD Tube 4: LPCVD Gas inlet assemblies: Shutoff valve Regulator Gauge Filter Manifold drop Process gas: No tubing bends Pyrogenic torch: Tube 2 Control cabinet: With casters System alarm panel (4) Microcontrollers: 7355 DDC (4) Boatloader: 7680.
  • BRUCE: BDF-41

    BRUCE BDF-41 Horizontal furnace 4-Stack Left handed Boat & temperature controllers installed Includes: (3) Tubes oxidation H2 Anneal Missing part: 7900 Gas controllers 1996 vintage.
  • BRUCE: BDF-40

    BRUCE BDF-40 Furnace bank APEX Host: Recipe generation & down load Real time furnace data screen & data capture PM Scheduling & lot tracking Single hosts supports Tube computer operation without APEX host Load stations Horizontal HEPA filtration ensuring particle free loading / Unloading of wafers Configured with automatic boat loader Paddle cantilever systems supporting up to 100 product wafers (3) Zone temperature controls With both external spike & internal profile thermo couples (4) Stacks: Furnace 201 (Top): High temperature atmospheric oxidation with (4) MFCs Plumbed for He (No MFC), O2 (No MFS), H2, Ar, N2, & Lo N2 Includes external torch & SCHUMACHER absolute trans-LC bubbler / Temperature controller Furnace 202: Atmospheric oxidation with (6) MFCs plumbed for He, O2, H2, Ar, N2, & Lo N2 Includes external torch & SCHUMACHER absolute trans-LC bubbler / Temperature controller Furnace 203: Atmospheric oxidation with (6) MFCs plumbed for He, O2, H2, Ar, N2, & N2 Lo Missing external torch & trans-LC bubbler / Temperature controller Furnace 204: LPCVD Polysilicon with (5) MFCs Plumbed for SiH4, individual MFCs for front flange & two injectors, N2 & Lo N2 Includes water cooled front flange & vacuum lines / Valving 1999 vintage.
  • BRUCE:

    BRUCE LPCVD horizontal diffusion furnace, 4-stack, 6".
  • BRUCE: BDF-41

    BRUCE BDF-41 Stack oxidation CVD furnace, 6" Garden variety (2) Tube PolySi CVD (2) Tube LPCVD 1992-1993 Vintage.
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