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578 RESULTS FOUND FOR: used Evaporators

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  • AIRCO TEMESCAL: TRC-3460

    AIRCO TEMESCAL TRC-3460 Crucible pocket selector Power: 240 / 120 VAC Input 1/8 amp - 1/4 amp fuse.
  • AIRCO TEMESCAL: TRC-3460

    AIRCO TEMESCAL TRC-3460 Crucible pocket selector Power: 240 / 120 VAC Input 1/8 amp - 1/4 amp fuse.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-beam evaporation system (Indium) Does not include: Cryo Cryo compressor Helium lines E-gun power supply.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 E-Beam evaporator With load lock Cryo pumped high vacuum system with roughing pump 4-Pocket gun with TEMESCAL Simba power supply INFICON IC4 Deposition monitor Bell jar ID: 19.5" Single substrate dome with rotation control, 17" Auto valve sequencer Substrate heaters.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 E-Beam evaporator With load lock Cryo pumped high vacuum system with roughing pump 4-Pocket gun with TEMESCAL Simba power supply INFICON IC4 Deposition monitor Bell jar ID: 19.5" Single substrate dome with rotation control, 17" Auto valve sequencer Substrate heaters.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 Load-locked e-beam evaporator Substrate heaters Cryo pumped high vacuum system with roughing pump 4-Pocket gun with TEMESCAL Simba power supply INFICON IC4 deposition monitor Bell jar: 19.5" ID 17" Single substrate dome with rotation control Auto valve sequencer.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 Evaporator With e-beam source Load lock system Includes: CTI-8 On-board cryopump and controller Air-cooled compressor GRANVILLE-PHILLIPS 307 Vacuum gauge controller TEMESCAL FDC-8000 Deposition controller Custom automatic bell jar lift and cycle controller EDWARDS E2M-40 Oil mechanical pump GP 308 Vacuum gauge TEMESCAL SFIH-270-2 Single pocket E-beam source Counter-top control cabinet Remote mounting of cryo compressor HV Power supply and mechanical pump (20) Cables TEMESCAL Auto sequence valve controller: Removed from rack Electronic control rack Simba 15 kW high voltage power supply TEMESCAL E-beam gun and sweep controller Missing parts: Electronic box covers Relay Sequence controller Helium lines leaked when machine was being disconnected Systems will require recharging of the Helium for the cryopumps Required power: 480 V, 3 Phase 1990 vintage.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 E-beam deposition system Process: Used mainly for dielectrics (TiOx and SiOx) Bell jar: 18" metal, rotation on top Planetary for 3" wafers Power supply: CV-8 STIH-270 4-pocket hearth Crystal controller.
  • AIRCO TEMESCAL: BJD-2000

    AIRCO TEMESCAL BJD-2000 E-Beam evaporation system, 2".
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-beam evaporator Specifications: (6) pockets CTI 8 cry and compressor IonTec MPS-3000 FC MKS 246 IC-5 deposition controller Temescal sweep controller CV8 Temescal SRT-402 pocket controller Edwards 40 mechanical pump 208V, 70A, 3Ph, 60Hz.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 Evaporator With E-beam source Load lock system Includes: CTI-8 On-board cryopump & controller Air-cooled compressor GRANVILLE-PHILLIPS 307 Vacuum gauge controller TEMESCAL FDC-8000 Deposition controller Custom automatic bell jar lift and cycle controller EDWARDS E2M-40 Oil mechanical pump GP 308 Vacuum gauge TEMESCAL SFIH-270-2 Single pocket E-beam source Counter-top control cabinet Remote mounting of cryo compressor HV Power supply & mechanical pump (20) Cables TEMESCAL Auto sequence valve controller: Removed from rack Electronic control rack Simba 15 kW high voltage power supply TEMESCAL E-beam gun & sweep controller Missing parts: Electronic box covers Relay Sequence controller Power requirement: 480 V, 3 Phase 1990 vintage.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 Evaporator With E-beam source Load lock system Includes: CTI-8 On-board cryopump & controller Air-cooled compressor GRANVILLE-PHILLIPS 307 Vacuum gauge controller TEMESCAL FDC-8000 Deposition controller Custom automatic bell jar lift and cycle controller EDWARDS E2M-40 Oil mechanical pump GP 308 Vacuum gauge TEMESCAL SFIH-270-2 Single pocket E-beam source Counter-top control cabinet Remote mounting of cryo compressor HV Power supply & mechanical pump (20) Cables TEMESCAL Auto sequence valve controller: Removed from rack Electronic control rack Simba 15 kW high voltage power supply TEMESCAL E-beam gun & sweep controller Missing parts: Electronic box covers Relay Sequence controller Power requirement: 480 V, 3 Phase 1990 vintage.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-Beam evaporator CTI-8 Cryo pump 4-Pocket gun 7cc Temescal CV-8 Power supply Heaters with heat controller IC-600 Film thickness monitor Versavac ion gauge controller Temescal viewvac port XYS-8 Sweep control 208 Volt Auto regeneration on Cryo, Temescal Shutter cont. Substration speed cont.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 E-Beam evaporator For sensors (4) Pockets 25cc per pocket e-gun Includes: CTI Cryo Torr cryo pump Oil vacuum pump CV-8 Power supply AIRCO FDC8000 Deposition controller Not included: Cryo pump compressor Chiller.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 E-Beam evaporator With load lock Cryo pumped high vacuum system with roughing pump 4-Pocket gun with TEMESCAL Simba power supply INFICON IC4 Deposition monitor Bell jar ID: 19.5" Single substrate dome with rotation control, 17" Auto valve sequencer Substrate heaters.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 Load-locked e-beam evaporator Substrate heaters Cryo pumped high vacuum system with roughing pump 4-Pocket gun with TEMESCAL Simba power supply INFICON IC4 deposition monitor Bell jar: 19.5" ID 17" Single substrate dome with rotation control Auto valve sequencer.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-Beam metal evaporator Evaporation through lift off mask (4) Pocket guns Automatic valve control Materials: Au, Ge, Ni, Ti, Pt Evaporation rates: 0.3 nm/s Fast pump down: Load lock With monitor evaporation through crystal monitors Angle deposition stage Manual wafer loading CTI Cryopump and compressor Deposit gold onto SiC substrate Constant AC power at full load AC current: TT-6: 21.8 A TT-6E: 10.8 A TT-6J: 20.3 Regulation: < 2% of max Ripple: < 100 Volts pk-pk Factory set current cutback level: 800 ma @ 7kV Current cutback response: < 100 microseconds Output voltage range: 6.5 to 7.5 kV DC (Negative) Output current (Maximum): 750 ma @ 7kV Input power: 208 / 240 Volts, 3-Phase, 60 Hz 380 / 415 Volts, 3-Phase, 50 Hz.
  • AIRCO TEMESCAL: PVD 1800

    AIRCO TEMESCAL PVD 1800 Evaporator system Included: (3) 3” Guns Load lock Planetary system with rotation Small frame Power: AE DC Power supplies.
  • AIRCO TEMESCAL: FC 2800

    AIRCO TEMESCAL FC 2800 E-Beam evaporator.
  • AIRCO TEMESCAL: FC 3200

    AIRCO TEMESCAL FC 3200 Thermal evaporation system Dual electron beam Process chamber: 32" x 32", water-cooled Flat planetary: 10.6", high speed Control system: GE Fanuc PLC Integrated cryo pump regeneration Process recipe control Data logging Onboard flat screen integrated Windows PC GE Fanuc PLC control system: Windows based PC with keyboard and trackball mouse General Electric Cimplicity HMI Software Operator / Engineer computer interface includes: Data logging of: Ion & Convectron, valves & chamber heat User level system control Integrated cryo pump regen control Process recipe editing All required software programming (2) Telemark TT-6, digital display and programmable sweep control (2) single pocket Temescal electron Beam Guns 5KVA, SCR controlled transformer and fixturing to accept customer specified thermal evaporation boats. Feedthroughs for one resistive thermal source (3) Separate source shutters for each source (2) 2kw heater assemblies with feed throughs and temperature control, 4KW total 2 Ion / 4 Convectron gauge 32" x 32" S/S Process chamber (water cooled) with full opening door with viewport VV-400 viewport with shutter, installed in lower chamber to view sources during deposition process PLC closed loop pressure control through 02 MFC / Granville Phillips 354 Operational CTI 400 Cryo Pump with CTI 1020R compressor. PLC controlled automatic regeneration and N2 purge gas heater Deposition rate monitor using a Maxtek 6 mhz quartz crystal sensor, programmable (3) planets for (4) 4" inch variable speed single plane planetary system; 12 wafers/run Separate free standing rack for thermal power supply transformer and TT6 power units Leybold D-30, 2 stage direct drive 26cfm mechanical pump.
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