Exposure Systems

- RP-31U UV Press machine, 8" 1997 vintage.

ABM 350W System.

ADVANCED ENGINEERING UV 9300 Fully automatic UV Curing system, up to 12" Specifications: Wafer/Frame size: All standard sizes 6”, 8” and 12” Effective UV wavelength: 365 nm Throughput: 8 minutes per 13-frame cassette Control unit: Pentium 4 PC, Windows 2000 Operating System Electrical utility: 110/240 Vac, 50/60 Hz Power: 1000 W (max.) UV Light Source: Ozone-free, low pressure UV lamps Air: 72 p.s.i., c.d.a. or 5 bar, c.d.a.

ADVANCED ENGINEERING 951 UV Dicing tape curing system, 8" Wavelength: 365 nm Ozone free UV irradiation source Timer UV Intensity meter Lamp hour and status indicator Voltage: 110 V 2003 vintage.

AMERICAN ULTRAVIOLET IR-1000NF / PC-10-1-HZ UV Irradiator, 1000 W 100/250/300 wpi Elliptical mirror Mercury vapor lamp Output range: 185 - 400 nm New Lamp Power supply, PC-10, 120 V.

AMERICAN ULTRAVIOLET / LOCTITE 980808 UV cure system Volts: 120 hz 60 amps 20.

AMERICAN ULTRAVIOLET / LOCTITE 980808 UV cure system Volts: 120 hz 60 amps 20.

AXCELIS / FUSION Gemini GPS UV Photo stabilizer, 8" P/N: 398133 (2) Chambers Standalone system SECS/GEMS Loading: (2) Cassettes / SMIF Mini environment 4-Axis robot Power: 200 VAC, 50/60 Hz, 3 phase, 5 wire Faulty part: Main panel 2000 vintage.

AXCELIS / FUSION Gemini GPS UV Photo stabilizer, 8" P/N: 398133 (2) Chambers Standalone system SECS/GEMS Loading: (2) Cassettes / SMIF Mini environment 4-Axis robot Power: 200 VAC, 50/60 Hz, 3 phase, 5 wire Faulty part: Main panel 2000 vintage.

AXCELIS / FUSION Gemini Photostabilizer.

AXCELIS / FUSION M 150PC UV Bake systems. DELATECH 857 Exhaust Gas Controlled CDO Scrubber.

AXCELIS / FUSION 200 PCU UV Resist stabilization, 6" 2001 vintage.

AXCELIS / FUSION M 200 PCU Photostabilizer Irradiator included.

AXCELIS / FUSION PS3 UV Bake system, 12" With (2) chambers Cassette to cassette Power supply: 208 V, 30 A, 80 A(2), 60 Hz, 1-Phase 2002 vintage.

AXCELIS / FUSION 200 PCU Photo stabilizer, 8" Configured for 6" UV Bake process Irradiator contains Hg high intensity lamp 2.45 GHz Magnetrons for UV radiation generation Cassette to cassette operation Microprocessor controlled Pneumatic controlled uplift for irradiator UV Port housing Operations manual and documentation.

AXCELIS / FUSION M 200 PCU Photostabilizer, 8", parts machine UV Power supply: 60 Not included: (2) Transformers 60Hz Missing parts: Air jets UV Lamp Hg Lamp Irradiator baseplate M200 Optical sensor Aluminum SWAGELOK fittings.

AXCELIS / FUSION M 150PC Photostabilizer, 6" Includes: Cabinet with SST panels Wafer chuck assembly (2) Cassette elevators (2) Wafer handling robots AC Distribution box Empty card cage Cables.

AXCELIS / FUSION M 200 PCUP-Polo Photostabilizer Variable intensity illumination P/N: SC5415A.

AXCELIS / FUSION 200 MCU Photostabilizer.

AXCELIS / FUSION M 200 PCU Photo stabilizer, 8" P/N: 203691.