Used AMAT / APPLIED MATERIALS PI 9500XR #187269 for sale

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AMAT / APPLIED MATERIALS PI 9500XR
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ID: 187269
Wafer Size: 8"
Ion Implanter, 8" Direct drive Gas: BF3 Solid: As,P 1996 vintage.
AMAT / APPLIED MATERIALS PI 9500XR is a state-of-the-art ion implanter and monitor designed to provide reliable and precise control over both the energy range and current levels in the ion implantation process. The 9500XR allows for extremely precise control over the energy range, current levels, and total ion dose, providing optimal process control for critical implantation applications in the semiconductor and other related industries. The 9500XR is capable of implantations of up to 250 keV with a broad current range of up to 50µA and a maximum dose delivery rate of 1.15 µA/cm2. Its onboard microprocessor allows for rapid and accurate positioning of the filament assembly and gas feed to provide precise energy ranges and currents. The 9500XR also incorporates advanced digital signal processing (DSP) to ensure accuracy and optimize beam area scanning. When coupled with AMAT powerful Beam Positioning Equipment (BPS), AMAT PI 9500XR provides precise and controllable beam positioning control. The BPS can activelly control acceleration and deceleration of efferent beam speed as well as scan calibration and spacing to optimize beam performance and achieve the desired dose delivery rates. The design of APPLIED MATERIALS PI 9500 XR provides a high-quality, stable and repeatable ion beam with a minimum of space charge distortion. The system's unique gun design, with its infinitely adjustable geometry, provides exceptional control over beam spot control and sharpness. Its erosion control allows for precise source repair without the need for adjustments. The unit also boasts a range of safety and monitoring features. Its SiC sensors ensure that the implantation process remains safe at all times. Additionally, its automatic machine switches off the supply when a minimum voltage setting or maximum current is exceeded. This helps to ensure a safe and reliable process even if there are fluctuations in the tool. AMAT / APPLIED MATERIALS PI 9500 XR is an advanced, reliable, and precise ion implanter and monitor that helps ensure optimal process control in the semiconductor and other related industries. With its wide range of features and powerful beam positioning capabilities, APPLIED MATERIALS PI 9500XR provides a dependable and efficient implantation solution.
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