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995 results for found: used Ion Milling

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  • 4WAVE: -

    4WAVE - Ion beam deposition system Applications: Materials research and development High output, low-energy plasma source 3 x 4″ Biased target carousel Independent target biasing for alloy composition control Process surface: 100 mm Diameter < 3% non-uniformity over: 75 mm Substrate plasma cleaning, etching oxidation, nitridation Water cooled, rotating, shuttered stage Single wafer load lock stage Technology (modules): Soft etch Co-Sputtering of 1-3 target materials Reactive sputtering Integration: Full computer control Ball room style Currently installed.
  • ALTURA / FEI: 855

    ALTURA / FEI 855 FIB-SEM Cuts sample, then uses the SEM to locate and image any defects Cuts a thin slice (30-50 nm), lifts it out, then images it using TEM/STEM with EDS/EELS to measure the chemistry 2005 vintage.
  • CCR TECHNOLOGY: COPRA DN 160

    CCR TECHNOLOGY Copra DN 160 Ion gun.
  • COMMONWEALTH SCIENTIFIC / VEECO: MARK II

    COMMONWEALTH SCIENTIFIC / VEECO: Mark II Controller.
  • COMMONWEALTH SCIENTIFIC / VEECO: MILLATRON 8-C

    COMMONWEALTH SCIENTIFIC / VEECO Millatron 8-C Ion beam milling system, 1991 vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: 8C

    COMMONWEALTH SCIENTIFIC / VEECO 8C Ion Beam Milling System VIII Ion Source CTI 8 Cryo Pump 8 x 3” Dia. Planetary Stage Power: 120/208 V, 3 PH, 60 Hz, 40 A Water Cooling: 3.8 Liters/Min @ 20 deg C Nitrogen Backfill: 100 Liters/Cycle Compressed Air: 6.2 Bar Process Gas: 20 SCCM 1990 Vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: SORCERER

    COMMONWEALTH SCIENTIFIC / VEECO Sorcerer Ion Beam system Ion Power Supply 6" Stage with rotation and tilt Large cylindrical chamber (CHA Mark 40) Pfieffer 2200 turbo pump Mass flow controls
  • COMMONWEALTH SCIENTIFIC / VEECO: -

    COMMONWEALTH SCIENTIFIC / VEECO Ion milling system Source: 4" Rotating substrate holder, adjustable angle Power supply Roughing pump Diffusion pump.
  • COMMONWEALTH SCIENTIFIC / VEECO: 8C

    COMMONWEALTH SCIENTIFIC / VEECO 8C Ion Milling systems Rotating stage Requires clamping fixture to hold 4" wafer Hot tungsten wire neutralizer (front) Unit was removed from production line, includes one grid set and Polycold water pump The ion source controller has been upgraded to Well 5200 Available installation / startup service in North America by professional engineer Can be inspected 1994 vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: 8C

    COMMONWEALTH SCIENTIFIC / VEECO: 8C Ion Milling systems Rotating stage Requires clamping fixture to hold 4" wafer Hot tungsten wire neutralizer (front) Operation Semi-automatic Voltage 200V 3 Phases Process Chamber 304 Stainless Steel Ultimate Vacuum 1.0E-6 torr Sample Size 2" - 4"(7 pieces) Process Angle -90° to +90° (Motor-driven) Fixture rotation Yes Fixture cooling Chiller Ion Source Kaufman Ion Source Process Gas Argon with MFC control Filament Cathode Tungsten Filament Ion Gun Power Supply WELL 5100 (Japan) Ion Gun Max Power 1000V Ion Gun Max Current 800mA Grid Assembly Molybdenum High Vacuum Pump Varian VHS-10 Diffusion pump(5300 l/s) Low Vacuum Pump Leybold D30A Gauge Controller Granville Phillips 307 Stage capable of handling 7 wafers The ion source controller has been upgraded to Well 5200 Can be inspected 1994 vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: MARK II

    COMMONWEALTH SCIENTIFIC / VEECO Mark II Controller.
  • COMMONWEALTH SCIENTIFIC / VEECO: MARK II

    COMMONWEALTH SCIENTIFIC / VEECO Mark II Gridless ion sources.
  • COMMONWEALTH SCIENTIFIC / VEECO: SORCERER

    COMMONWEALTH SCIENTIFIC / VEECO Sorcerer Ion Beam system Ion Power Supply 6" Stage with rotation and tilt Large cylindrical chamber (CHA Mark 40) Pfieffer 2200 turbo pump Mass flow controls
  • COMMONWEALTH SCIENTIFIC / VEECO: MILLATRON 8-C

    COMMONWEALTH SCIENTIFIC / VEECO Millatron 8-C Ion beam milling system, 1991 vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: 8C

    COMMONWEALTH SCIENTIFIC / VEECO 8C Ion Beam Milling System VIII Ion Source CTI 8 Cryo Pump 8 x 3" Dia. Planetary Stage Power: 120/208 V, 3 PH, 60 Hz, 40 A Water Cooling: 3.8 Liters/Min at 20 deg C Nitrogen Backfill: 100 Liters/Cycle Compressed Air: 6.2 Bar Process Gas: 20 SCCM 1990 Vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: IBD MILLATRON

    COMMONWEALTH SCIENTIFIC / VEECO IBD Millatron Ion beam deposition system, 3" Previously ran DLC films Routinely provided NiFe, Al2O3, CZN, FeMn coating Coating specification: F Proven DLC Target: 5" Stage: 4.5" 4-target turret will hold 4 materials X-Y Stage Crystal monitor Shutter TECHWARE 68000 PLC for automation (2) Ion sources: both are DC, 3” source for assist, 2” source for deposition, both moly grids (2) ADVANCED ENERGY power supplies: ID2500 and ID3500 CTI-8 cryo compressor Requires TECHWARE-BROOKS Y2K upgrade 1998 vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: MARK II

    COMMONWEALTH SCIENTIFIC / VEECO Mark II Controller Stand alone unit without cables or head.
  • COMMONWEALTH SCIENTIFIC / VEECO: RIBE

    COMMONWEALTH SCIENTIFIC / VEECO RIBE CAIBE System Reactive ion beam etching Chemical assisted ion beam etching LEYBOLD TMP 1500C Turbo pump LEYBOLD D65BCS Mechanical vacuum pump Kaufman ion source: 16cm Pyrolitic graphite ion optics - RIBE Model 8377 stage Drichuk 150mm substrates - CAIBE IBS-600 Power supply Voltage: 2000eV Ion beam currents to 600mA GE Series 90-30 vacuum Process control Cimplicity 90-ADS operator interface (4) Gas control channels (upgradable to 6) CAIBE Chamber power supply: Defective Main computer control: Defective 1989 vintage.
  • COMMONWEALTH SCIENTIFIC / VEECO: 38J

    COMMONWEALTH SCIENTIFIC / VEECO 38J Ion mill Cryo pumped.
  • COMMONWEALTH SCIENTIFIC / VEECO: SORCERER

    COMMONWEALTH SCIENTIFIC / VEECO Sorcerer Ion Beam system Ion Power Supply 6" Stage with rotation and tilt Large cylindrical chamber (CHA Mark 40) Pfieffer 2200 turbo pump Mass flow controls
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