Mask Aligners

ABM - Mask aligner.

ABM - Mask aligner.

ABM - Mask aligner.

BROOKS AUTOMATION PRE-200-CE Aligner 2008 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner, 8"-12". 2008 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner 2008 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner 2006 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner, 8"-12". 2006 vintage.

BROOKS AUTOMATION PRE-201B-CE Aligner 2004 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner 2008 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner 2008 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner 2006 vintage.

BROOKS AUTOMATION PRE-200-CE Aligner 2006 vintage.

BROOKS AUTOMATION PRE-201B-CE Aligner 2004 vintage.

BSL / BETA SQUARED LITHOGRAPHY Micralign 552HT Mask aligner, 4" Process capability: 100 mm Frequency: 50/60 Hz Power supply: 208 / 220 / 240 V 2016 vintage.

BSL / BETA SQUARED LITHOGRAPHY OS2000 Mask aligner, 4"-6" Specifications: Resolution: 1.25 um lines and spaces, UV-4 (340-440nm) 1.0 um lines and spaces, UV-3 (300-350nm) Machine to machine overlay: +/- 0.25 um, 125 / 100 mm systems, 98% of data +/-0.30 um, 150 mm systems, 98% of data Machine to itself overlay: +/- 0.25 um, 98% of data Throughput: 120 Wafers per hour, 125 / 100 mm systems 100 Wafers per hour, 150 mm systems Depth of focus: +/- 6 um for 1.5 um lines and spaces Focus stability: +/- 2.0 um over 6 days Focus range: +/- 200 um, +/-450 um Extended bellows chuck: Partial Coherence: Variable, 0.37 to 0.86 Numerical Aperture: .167 Uniformity of Illumination: +/- 3.0% Particle generation: <7 Particles per wafer pass (1.0 um or larger) Pre alignment and first-level placement accuracy: +/-15 um Footprint: 18.65 Square feet (1.732 square meter) Electrical: 120 Vac at 10 Amps, or 240 Vac at 5 amps Includes: Several spare parts User manuals 2011 vintage.

CANON PLA 500 FA Mask aligner.

CANON PLA-501FA Aligners, 4"and 5".

CANON MPA 600 Super Mask aligner LBS Components installed.

CANON MPA 600 Super Mask aligner Standard pre-align, 6" Wafer chucks, 6" Mask holder, 7" Accurate slit: 1.6 mm 1990 vintage.