Rapid Thermal Processors

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP), 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 4100S Rapid Thermal Annealing (RTA) system 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor N2 Curtain TC Option Single-wafer Cassette-to-cassette Capable of processing wafers : Up to 1200°C Inert or corrosive ambient 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 4100S Rapid Thermal Annealing (RTA) system 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 610 Rapid Thermal Annealing (RTA) system.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 8800 Rapid Thermal Processor (RTP) system.

AG ASSOCIATES Heatpulse 8108 Rapid Thermal Processor (RTP) system Standard configuration 1994 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid Thermal Processor (RTP).

AG ASSOCIATES Heatpulse 4100 Rapid thermal processor 1991 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system, 4"-8" Single chamber Temperature range: 400°C-1300°C Includes: (2) Chillers Spare parts Voltage regulator Manuals 1995 vintage.

AG ASSOCIATES Heatpulse 8108 Rapid thermal processor (RTP) system Configuration: Installed susceptor autoloader station End effector type: Plunger type end effector Front GUI monitor: Wall right Ionizer for robot Temperature control: ERP With eZ-DTC Gas panel: Standard 6-gas O-Ring: Silicone Status light: Assembly indicator light Chiller for ERP pyrometer: NESLAB RTE-134A Oxygen level check unit for chamber: TORAY LC-750 Quartz wafer tray type MFCs: N2: 40slpm (UFC1660) connected O2: 10slpm (UFC 8100) connected NH3: 5slpm (1560A) not connected HCL: 200sccm (1560A) not connected Ar: 10slpm (1560A) not connected Power requirements: 208 V, 60 Hz, 5 wires 2004 vintage.

AG ASSOCIATES Heatpulse 8800 Rapid Thermal Processor (RTP) system.

AG ASSOCIATES Heatpulse 4100 Rapid Thermal Annealer (RTA), 4".