KENSINGTON CSMT-3

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Equipment Details Technical specifications such as wafer size, dimensions, process, # of chambers, etc. KENSINGTON CSMT-3 Station Sorting/Mapping Tool System, 8" Wafer Handling robot with Dual Paddle for High Throughput Advanced Cassette Sort Merge/Randomize/Split Capability Cassette Tilt Scanning/Mapping System with Transmissive Metrology Measures Actual Wafer Positions in Cassettes Detects Two-wafers-in-a-slot & Cross slotted wafers Wafers Handled through slot center for minimal contamination and gentle handling High Speed, High Resolution Prealigner Foresight OCR Recognition System OS/2 Operating System with Touch Screen Color Display: Pentium PC User Friendly Graphical Interface for all operations and Recipe Generation Ergonomic Stainless-Steel Frame Better that Class-1 Clean Room Compatibility Fail-Safe, Integrated Vacuum/Motion Controllers (Kensington Model 4000) Automatic Error-Condition Recovery Smooth, Digitally-controlled DC Servo Actuation of all axes Direct Motion Metrology of all axes: Fully Distributed Force/Position Feedback Sensing Automatic Tilt-Back locates Wafers against back of cassette: prevents migration 90° Tilt-Back Cassette Loading/Unloading addresses Carpel Tunnel Syndrome Concerns Colored Light System Status Beacon Un-interruptible Power Supply/Back-up Vacuum (UPS/BUV) System. 110VAC AC 50/60 Hz Automatically Unloads all wafers safely into their cassettes on total loss of power Keyboard Drawer Mirror-Bright #8 Electro-polished Laminar Flow Frame Top X-Windows Software Installation and on-site support System Options: GEMS/SECS-II Interface Intel Ether Express W/TCPIP or HSMS. More details will result in more accurate referrals. * Required Field Contact Information