Used MATTSON Millios for sale

Diffusion Furnaces & Accessories

Manufacturer

MATTSON

Model

Millios

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Flash Rapid Thermal Processor (FRTP) EFEM MPSU Module Service module Process module SCCT Rack VFD Mo

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Furnace 2011 vintage.

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Millisecond anneal system.

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Single chamber RTP system, 12" mS Anneal Single chamber platform Process capabiltiy for sd_anneal H