Used TYLAN FC-980 #293627795 for sale

Name: TYLAN FC-980
Brand: TYLAN
SKU: 293627795
Availability: InStock

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Spare Parts

Manufacturer

TYLAN

Model

FC-980

ID: 293627795

Mass Flow Controllers (MFC) Flows: 2 SLM, 100 SCCM, 2 SLM Gases: 1% PH3, HE, SiH2CL2, NH3.