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Spare Parts
TYLAN
FC-980
Used TYLAN FC-980 for sale
Spare Parts
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TYLAN
Model
FC-980
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TYLAN
FC-980
Mass Flow Controllers (MFC) Flows: 2 SLM, 100 SCCM, 2 SLM Gases: 1% PH3, HE, SiH2CL2, NH3.
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