Box Coaters

Metallizer Specifications: Suitable for 100~400 um Film 60~600 N web tension 12 nos. ceramic boats 1 kW x 18 cartridge heaters Dimmer for crucible control 5 kg Spool Knurling roll for wire feeding 10-3 to 10-6 Torr high vacuum side 18" dia Unwind & Rewind 2 nos. water cooled Shielding for 6 evaporation boats 300 m/min Currently deinstalled ~1980 vintage.

Vacuum metallizer, 620 mm Capacitor grade Al: Zn. 2~15 um Polyester, 2~6 um PC film 420 mm roll dia. 7~70 N web tension 1.5 mm Al wire. 6 nos. 10x20x105 mm intermetallic composite boats 7.5 KVA/boat, 1~5 ohms/sq dep. thk. 1~2 ohms/sq at 4 m/s of PP Oil Masking system: up to 5 mm Bandwidth Cold trap Cryogenic pump 90,000 l/sec 5x10-3 mbar, R512 refrigerant, Chiller 18 kW each Pump, 25 TR Compressors 8 mtr/sec, 135 KVA 1988 vintage.

EB-gun box coater Chamber: Stainless Steel Layer Measuring / Rate Control: Quarz Crystal & Optical Monitor OMD-8000 (new!). System is equiped with an intermittend direct monitoring on the substrate holder. EB-Gun: 6 (6kW), 1 / 2 or 4 Pocket Crucible HV Power Supply: 8 kW Substrate Heater: Quarz Heater below Glowing Device: 2000 V, 2 kW Ion source: End-Hall Ion source, D=10cm Thermal Evaporator: Boat Type 4 kVA, 6 V or 12 V Substrate Drive: Top Drive with Substrate Holders (Calotte) Vacuum system: Fore Pump: 1 x H&P TRP 90 (new!) Diffusion Pump: 1 x DI 3000 (Leybold) Baffle: Liquid Nitrogen Cold Trap: Option Vacuum Gauges: 2 x Pirani TTR90, 1 x Pfeifer IMR265 Flow Controller: 100 mln/min Water Manifold: Complette Manifold incl.Sensors Control System: LayOp Control System and Plant Visualisation for Multi-Layers 1988 vintage.

Box coater BALZERS Oil diffusion pump EDWARDS E2M80 Rotary pump EDWARDS EH500 Roots pump Meissner trap pumped with POLYCOLD PFC1100ST TEMESCAL STIH270-2CK/2CKB Electron gun TEMESCAL Simba 2 High voltage power supply Satis E-Gun crucible indexer TRC3460 (2) Thermal boat evaporators INFICON XTC/C Deposition controller with dual crystal head COMMONWEALTH SCIENTIFIC MKII Ion gun COMMONWEALTH SCIENTIFIC Power supply BALZERS RVG040 / RME010 Gas inlet control system BALZERS IMG300 Pressure measurement controller Rear surface heater Satis control system with ophthalmic processes Pump systems: Diffusion pump (1/s): 11500 Roots pump (m³/h): 500 Booster pump (m³/h): 80 Cryo pump (1/s): 16000 Booster pump: 100 Chamber volumes (I): Diffusion pump version: 705 Cryo pump version: 625 Substrate holder diameter (mm): 810 Number of substrate / Dome diameter: 51 / 156 66 / 96 75 / 72 80 / 64 Number of substrate / Flip over system diameter: 51 / 104 66 / 72 75 / 56 80 / 48 Manuals.

Box coater Includes: POLYCOLD Cooling system EUROCHILLER COMMONWEALTH Mark II Controllers VEECO MKI Ion gun AIRCO CV-8B-111 Power supplies Vacuum pump Turbo pump Fan T10 CPU Certified AIRCO Temsecal STIH 270 Egun 1999 vintage.

Single PBO Coater/ Developer.

Sputtering system With (2) rotatable cathodes Includes: E-Beam gun INFICON Deposition controller Triple pump system Primary pump Turbo pump Power supply: 750W 1992 vintage.

Box coater BALZERS Oil diffusion pump EDWARDS E2M175 Rotary pump EDWARDS EH1200 Roots pump Meissner trap pumped with dual output POLYCOLD PFC1100ST TEMESCAL STIH270 Electron gun TEMESCAL Simba 2 High voltage power supply (2) Thermal boat evaporators INFICON XTC/C Deposition controller with dual crystal head COMMONWEALTH SCIENTIFIC MK II Ion gun COMMONWEALTH SCIENTIFIC Power supply BALZERS RVG040 / RME010 Gas inlet control system BALZERS IMG300 Pressure measurement controller Satis control system with processes Diffusion pump (1/s): 20000 Substrate holder diameter: 1140 mm Standart dome diameter: 318, 168, 156, 126, 120 Filp-over system diameter: 252, 144, 120, 108, 96 PLC: SIEMENS Control PC: IBM OS: Windows Pump systems: Diffusion pump (1/s): 20000 Roots pump (m³/h): 1200 Booster pump (m³/h): 175 Cryo pump (1/s): 30000 Booster pump: 175 Chamber volumes (I): Diffusion pump version: 1000 Cryo pump version: 1000 Substrate holder diameter (mm): 1140 Number of substrate / Dome diameter: 51 / 318 66 / 168 75 / 126 80 / 120 Number of substrate / Flip over system diameter: 51 / 252 66 / 144 75 / 108 80 / 96 Manuals included 1997 vintage.

Metallizer system for CD/DVD.

Coater/ Developers.

Wafer edge exposure (WEE) system 2004 vintage.

Box coater.

Box coater.

Coating machine 1989 vintage.

Box coater.

Metallizer system for CD/DVD.

Double Coater/ Developer tracks.

Lithography trackers.

Metallizer Max containers: 2 x 40 ft Standard configuration Process: Coating on polyester / OPP films Specifications: Suitable for 8~500 um film 60~600 N web tension 1000 mm dia Unwind & Rewind (15) boats (2) nos. water cooled Shielding for 7 & 8 evaporation boats 400 mm dia Coating drum 480 m/min 15 sec Decceleration time Elec. hoist. 1 cu.m./hr compressed air 15 cu.m./hr 20~25 C cooling water 380 KVA connected 8 m/sec Currently de-installed ~1988 vintage.

R&D slot die coater, 4" Equipped with substrate thickness and coating gap sensors (3) Supply reservoirs: configured as dual ink supply plus rinse Main coater unit Control system Electrical cabinet Glove box feedthroughs (2) Dies, (1) spare Manuals included in electronic form Optional: 5-station VAC Atmosphere glove box 2013 vintage.