Box Coaters

Metallizer Specifications: Suitable for 100~400 um Film 60~600 N web tension 12 nos. ceramic boats 1 kW x 18 cartridge heaters Dimmer for crucible control 5 kg Spool Knurling roll for wire feeding 10-3 to 10-6 Torr high vacuum side 18" dia Unwind & Rewind 2 nos. water cooled Shielding for 6 evaporation boats 300 m/min Currently deinstalled ~1980 vintage.

EB-gun box coater Chamber: Stainless Steel Layer Measuring / Rate Control: Quarz Crystal & Optical Monitor OMD-8000 (new!). System is equiped with an intermittend direct monitoring on the substrate holder. EB-Gun: 6 (6kW), 1 / 2 or 4 Pocket Crucible HV Power Supply: 8 kW Substrate Heater: Quarz Heater below Glowing Device: 2000 V, 2 kW Ion source: End-Hall Ion source, D=10cm Thermal Evaporator: Boat Type 4 kVA, 6 V or 12 V Substrate Drive: Top Drive with Substrate Holders (Calotte) Vacuum system: Fore Pump: 1 x H&P TRP 90 (new!) Diffusion Pump: 1 x DI 3000 (Leybold) Baffle: Liquid Nitrogen Cold Trap: Option Vacuum Gauges: 2 x Pirani TTR90, 1 x Pfeifer IMR265 Flow Controller: 100 mln/min Water Manifold: Complette Manifold incl.Sensors Control System: LayOp Control System and Plant Visualisation for Multi-Layers 1988 vintage.

Vacuum metallizer, 620 mm Capacitor grade Al: Zn. 2~15 um Polyester, 2~6 um PC film 420 mm roll dia. 7~70 N web tension 1.5 mm Al wire. 6 nos. 10x20x105 mm intermetallic composite boats 7.5 KVA/boat, 1~5 ohms/sq dep. thk. 1~2 ohms/sq at 4 m/s of PP Oil Masking system: up to 5 mm Bandwidth Cold trap Cryogenic pump 90,000 l/sec 5x10-3 mbar, R512 refrigerant, Chiller 18 kW each Pump, 25 TR Compressors 8 mtr/sec, 135 KVA 1988 vintage.

Box coater BALZERS Oil diffusion pump EDWARDS E2M80 Rotary pump EDWARDS EH500 Roots pump Meissner trap pumped with POLYCOLD PFC1100ST TEMESCAL STIH270-2CK/2CKB Electron gun TEMESCAL Simba 2 high voltage power supply Satis e-gun crucible indexer TRC3460 (2) Thermal boat evaporators INFICON XTC/C Deposition controller with dual crystal head COMMONWEALTH SCIENTIFIC MKII Ion gun COMMONWEALTH SCIENTIFIC Power supply BALZERS RVG040 / RME010 Gas inlet control system BALZERS IMG300 Pressure measurement controller Rear surface heater Satis control system with ophthalmic processes Manuals.

Box coater Includes: POLYCOLD Cooling system EUROCHILLER COMMONWEALTH Mark II Controllers VEECO MKI Ion gun AIRCO CV-8B-111 Power supplies Vacuum pump Turbo pump Fan T10 CPU Certified AIRCO Temsecal STIH 270 Egun 1999 vintage.

Single PBO Coater/ Developer.

Sputtering system Includes: E-beam gun INFICON deposition controller Triple pump system Heater and all usual instruments associated with vacuum systems Primary Pump Turbo Pump New 750W Power Supply Optional: second flat door with 2 rotatable magnetrons 1992 vintage.

Metallizer system for CD/DVD.

Wafer edge exposure (WEE) system 2004 vintage.

Box coater.

Coater/ Developers.

Box coater BALZERS Oil diffusion pump EDWARDS E2M175 Rotary pump EDWARDS EH1200 Roots pump Meissner trap pumped with dual output POLYCOLD PFC1100ST TEMESCAL STIH270 Electron gun TEMESCAL Simba 2 High voltage power supply (2) Thermal boat evaporators INFICON XTC/C Deposition controller with dual crystal head COMMONWEALTH SCIENTIFIC MK II Ion gun COMMONWEALTH SCIENTIFIC Power supply BALZERS RVG040 / RME010 Gas inlet control system BALZERS IMG300 Pressure measurement controller Satis control system with processes Diffusion pump (1/s): 20000 Substrate holder diameter: 1140 mm Standart dome diameter: 318, 168, 156, 126, 120 Filp-over system diameter: 252, 144, 120, 108, 96 PLC: SIEMENS Control PC: IBM OS: Windows Manuals included 1997 vintage.

Metallizer system for CD/DVD.

Coating machine 1989 vintage.

Box coater.

Double Coater/ Developer tracks.

Box coater.

Coating system Chamber, 47" Large pocket e-guns: Power supply Indexers Shutters / XY Sweep controllers Dual stage rotation KRI Ion source & power supplies Vacuum gauging IfC3 Thickness monitor Manual control panel Heater POLYCOLD / Diffusion pump & valves EDWARD Mechanical pump & blowers 2001 vintage.

Metallizer Max containers: 2 x 40 ft Standard configuration Process: Coating on polyester / OPP films Specifications: Suitable for 8~500 um film 60~600 N web tension 1000 mm dia Unwind & Rewind (15) boats (2) nos. water cooled Shielding for 7 & 8 evaporation boats 400 mm dia Coating drum 480 m/min 15 sec Decceleration time Elec. hoist. 1 cu.m./hr compressed air 15 cu.m./hr 20~25 C cooling water 380 KVA connected 8 m/sec Currently de-installed ~1988 vintage.

Metallizer system for CD/DVD.