Mask & Wafer Inspection

Metrology inspection system Program software: DOS 6.20 (Japanes version) Software version: 2.30*1 Available wafer site: 8" Fouse control: Auto focus Light Source 400 to 800mw halogen lamp Used voltage/watt: 6V 15W Monitor/key board : CRT Spectrophotometer Head Photointensity meter reads: Zero intensity: 0.8, high intensity: 66 Gain 8 Zero control Wavelength counter control User interface RS232C Utility Power: AFT Controller 1COW Motor Driver controller 1COW Computer 1COW Printor 1COW 1993 vintage.

Optical thickness monitor.

Wafer inspection system.

Optistation microscopes.

Microscope with (5) lenses.

BF / DF Microscope with vertical illuminator 6V, 20W halogen lamphouse with socket and bulb Ergonomic tilting binocular head Pair of 10x WF eye pieces Motorized 5 place nose piece 10x, 20x, 50x, 100x, BF / DF objectives included 5"x 5" X-Y mechanical stage Built-in 6V, 20w power supply.

BF / DF Microscope Modulopak vertical illuminator 6"x 6" X-Y mechanical stage with glass plate Ergonomic tilting trinocular head 12V, 100W lamphouse with socket and bulb Pair of 10x WF eye pieces Motorized 5 place nose piece NPL 5x, 10x, 20x, 50x, 100x BF / DF objectives included.

Wafer Inspection system with wafer loader, 3"-6" Nikon optics including 10x, 20x, 40x, 60x, BD objectives Bright field, dark field reflected light measurements 8"x15" stage 6"x6" stage movement.

CD Measurment System, setup for mask work with multiple size holders.

Interference scopes.

High speed 3D Susp inspection system 3D sensor (1.9um Z resolutions, 20um x,y, resolution), 6-output pneumatic / vacuum module, Precision ground alignment tool, Fixture base plate, 3D calibration tool, 3D image processing PC.

Brightfield Microscope Stand Motorized nosepiece 12volt 100 watt regulating transformer 12 volt 100 watt Lamphouse Trinocular tilting head with photo tube 6”x 6” Stage with right hand drive Vertical illuminator and tube lens with apperture diaphragm's 10x Eyepieces 10x B DIC Objective 20x B DIC Objective 50x B DIC Objective 100x B DIC Objective UNIVERSAL USB Digital camera with c-mount and coupler Fluorescence vertical illuminator Brightfield Cube & UV Cube Complete with HBO 100 Power supply.

Automated inspection stations, 5" 1991-1997 vintage.

Defect inspection system, 4"-8" Power console with emergency off switch Signal tower Intermediate tube with camera port Microscope: 5x, 20x, 50x, 100x, 150x(1), 150x(2) Operator console with trackball and joystick (ASCII keyboard underneath) Observation tube with eyepieces X-Y stage Motorized beamsplitter LCD monitor Cassette port with tilting mechanism Control electronics Transport wheels Contamination protection Prealignment: Contact-free, ± 0.25° rotational < ± 50 micron in x and y Macro defect control: Optional wobbler with illumination device User interface: Windows NT based inspection Interface: RS 232-SECS 1/2, Ethernet interface DUV Function: Not setup Does not include: Macro defect control, wobbler with illumination device 2003 vintage.

Film thickness measurement system, 3"-8" Capable of accommodating wafers from 75mm to 200mm Olympus 5x, 10x, and 50xULWD objectives Olympus 10x eyepiece System Computer and Software Visible Single Layer Films: 500 – 50,000A UV Single Layer Films: 25 – 500A Visible Double (Top) Layer Films: 100 – 30,000A Visible Double (Bottom) Layer Films: 500 – 50,000A -Single Layer Thick Films Visible: 4 – 75 um Reflectance Visible: 400 – 850nm Oxide on Poly UV: 150 – 10,000A Oxide on Metal Visible: 3,000 – 20,000A Oxide on Metal UV: 500 – 5,000A Operator Manual and Documentation.

Film thickness analyzer, up to 8" 2001-2002 vintage.

Texture measuring machine Motorized column and stand.

Interferometer Camera inside LC Video monitor for display Transmission flat, 6" Test beam diameter options: 4" (102 mm), 6" (152 mm) Configuration options: Horizontal Vertical 3 rods downward looking / Upward looking Optical center line: 4.25" (108 mm) Alignment system: Quick fringe acquisition system (QFAS) With twin spot reticle Zoom range: 6:1 (GPI ST) Alignment field of view: 4" ±3° 6" ±2° Pupil focus range: ±100 mm, 4" aperture Part viewing: 9" Monitor Video output: 525 lines / 60 Hz (2:1 interlace) RS-170 / 625 lines / 60 Hz System quality: Plano testing: λ/20 Spherical testing: λ/10 Type: Helium-neon, class II Wavelength: 632.8 nm Beam polarization: Circular Coherence length: > 328 ft 2001 vintage.

Inspection system, 8".

Inspection system, 12" 2004 vintage.