Mask Aligners

Aligners, 6".

Aligner, 5" 1982 vintage.

Aligners, 4"-6" Mask sizes: 5”-7” Resolution: 1.5 um (Using positive resist) Illumination: High pressure mercury lamp: 2 kW Wavelengths: 365nm (I-Line), 405nm (H-line), 436nm (G-line) Intensity: (@ 1800 Watts power output) >700mW, 4" >650mW, 5" >600mW, 6" Intensity / Exposure uniformity: Within ± 3% CTC: Monitors and controls system temperature within ±3°C PDC: Provides fine distortion compensation Automatic alignment: HeNe (633nm) Laser beam scanning Alignment modes: Spot beam / Sheet beam Accuracy: 3 Sigma <=.54 um MPA-600 FA: 200 VAC, 3-Phase, 6 kVA, 50/60 Hz Air supply (CTC): 200 VAC, 3-Phase, 8 kVA, 50/60 Hz CDA (Clean dry air) Pressure: Flow rate 130 lit/min Vacuum: >50 cmHg Exhaust flow (For illuminator): 6.5 m/sec - 9.5 m/sec (Measured at illuminator output).

Mask aligner.

Aligner, 3"-4" IR Back side alignment.

Aligners, 4"-6" With 500W UV or DUV Illumination system Print resolution:1 mu.

Aligners, 4"and 5".

Aligner, 5" 1996 vintage.

Mask aligner.

Mask aligner, 4" BSA Lamphouse: 500W Automatic filter exchanger Conversion kit: 6" 2008 vintage.

Double sided mask aligner.

Mask aligner, 2" 2007 vintage.

Mask aligner 2011 vintage.

Spray coater.

Mask aligners.

Mask aligner, 4" Hard / soft contact modes (1) Micron resolution Split field video optics Requires 115V, house nitrogen or CDA, house vacuum Power supply: 350 Watt.

Mask aligner.

Mask aligner, 5".

Mask aligner Lamp power supply CIC00/1000 for constant power and constant intensity Exposure optics: UV400 Exposure timer M204 Splitfield microscope with photo tubes Included: (10) Occulars Set of objectives OLYMPUS MPlan FL N 10x/0,30 Mask holder bottom loading, 5" Wafer diameter: 100 mm Chuck specification for substrates / 100 mm wafer for soft contact.

Mask aligner.