Ion Implanters & Monitors

Ion implanter.

Implanter, 8".

Ion implanter.

Ion implanter, 12".

Medium current ion implanter 2005 vintage.

Medium current ion implanter N2 DA 1993 vintage.

Mid current ion implanter, 8".

High Current Implater 2 EACH 5” WAFER FULL CLAMP DISC WITH NEW RGA COATING 90KV HIGH VOLTAGE MANUAL LOAD STATION WITH AIR FILTER HOOD VACCUM ARM LODAING FAST SCAN/E-SHOWER AND SUPPLY 7.12 VERSION SOFTWARE FOR END STATION NV-10 CONTROL CONSLE EMS POWER SUPPLY ( 90K) UP GRADE FILAMENT POWER SUPPLY ALL NEW TUBING FOR AIR , WATER, AND N2 NEW PAINTING FOR PANELS REBUILT PUMP PACKAGE TWO EACH CTI-8 CYRO PUMPS REBUILT SOURCE DIFFUSION PUMP OPERATION AND MAINTENANCE MANUAL.

Probe 500I.

Ion implant measurement system.

Ion implant monitor system, 8".

Lot of implanters: Make Model Description APPLIED MATERIALS Quantum III Ion implanter VARIAN E1000 Implanter APPLIED MATERIALS XR80 Implanter APPLIED MATERIALS 9500 Implanter VARIAN E500 Current implanter.

Implanter, 8".

Ion implanter, 3"-4" Research cube end station.

Implanter 1986 vintage.

Mid current ion implanter, 4"-6" Set for Phosphine, BF3, and Arsine Standard configuration 1985 vintage.

Implanter 1996 vintage.

Ion implanter.

High energy implanter, 8" Source module: Gas box: Gas line #1: HP(Ar) Tylan 2900 Gas line #2: HP (BF3) UNIT 8162 Gas line #3 : SDS PH3 MKS 1640A Gas line #4: SDS ASH3 MKS 1640A Isolation transformer type: Oil type Injector module: Source type: ELS / Non-vaporizer Extraction electrode type: 3-Axes electrode Bushing type: Red P1 Model: BOC EDWARDS STP-2000C RP1 Model: Ebara 40X20 dry pump Facilities module: Machine transformer select : Dry type (1) Triple loops chiller AFFINITY CWA-300L-VHE-3LP P/N:10185 (1) Disk chiller: AFFINITY RWA-012T-BE03CB P/N:7666 (2) CTI Cryogenic 9600 X2 compressors Linac module: P4: LEYBOLD Turbovac 1000C P5: LEYBOLD Turbovac 1000C RP2: EBARA 40X20 Dry pump (4) RFG-3000 (6) RFG-3001 FEM Module: FEM Power EMS:03-165-2-D P/N:00473110 EMS:03-165-2-D P/N:00473110 FEM Guss: P/N:1182890 Endstation module: IG1/IG3 Contoller: 307 Type controller IG3: Ion gauge tape: 274012 In-air controller type: 4-Axes DI A19077 Assy no:1520960 Robot controller type(Macobot controller): 4-Axes DI A42891 Assy no:1520960 Y-Scan controller type: 4-Axes DI P97801092 Gyro controller type: 4-Axes DI A06078 Assy No:1520960 P/N:1177580 Dose controller type: Universal B43017 Assy no:152060 Disk module: P2: CTI Cryogenic OB 8 P3: CTI Cryogenic OB 10 P9: CTI Cryogenic OB 250F RP4: EBARA 40x20 Dry pump Flag faraday: Standard Disk model: Si coating Rotary motor type: Belt drive P/N: 152164 Vacuum cassette elevator type: GRTV Type not vespel X1 Notch/Flat finder: Flat Quad rack module:1178680 E/S Elec rack / Quad console module: 178580.

Cassette tray indexer, 6" For APPLIED MATERIALS 9500xR implanters.